SOLICITATION NOTICE
66 -- FURNACE SYSTEM FOR OXIDATION AND ANNEALING OF SEMICONDUCTOR WAFERS
- Notice Date
- 7/2/2002
- Notice Type
- Solicitation Notice
- Contracting Office
- NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135
- ZIP Code
- 44135
- Solicitation Number
- 3-202396
- Response Due
- 7/23/2002
- Archive Date
- 7/2/2003
- Point of Contact
- Carol K. Sharp, Contracting Officer, Phone (216) 433-2771, Fax (216) 433-2480, Email Carol.K.Sharp@grc.nasa.gov
- E-Mail Address
-
Carol K. Sharp
(Carol.K.Sharp@grc.nasa.gov)
- Description
- This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). Four-chamber furnace system for oxidation and annealing of semiconductor wafers, 1 ea., per the following specifications: 1.1 Scope: A four-chamber furnace system is needed to support research at NASA Glenn Research Center on microelectromechanical systems (MEMS) and high-temperature electronics using SiC. The furnace system will be used for annealing and oxidation of silicon carbide (SiC) and silicon wafers. 1.2 Description: The furnace shall consist of the following principal components: 1. furnace section, consisting of insulated enclosure, heating elements, temperature sensors, vestibule blocks and scavenger boxes. 2. gas cabinet, consisting of enclosure, gas supply plumbing, and mass flow controllers. 3. tube-level process controllers. 1.3 Intended use: 1. The furnace will be used to for the annealing and oxidation of 2-in and 4-in diameter SiC wafers. The quartzware will later be replaced to enable processing of 6-in diameter wafers. 2. Process temperatures for all chambers will be in the range from 550 to 1250 degrees Celsius. 3. Typical process load will be 25 wafers in one quartz boat, with a length of approximately 5 inches. 2.0 Performance requirements This specification shall define the minimum acceptable performance of the equipment to be purchased. 2.1 Furnace requirements: 2.1.1 General 1. The furnace shall be designed for a bulkhead installation. The furnace will be installed in a class 10,000 chase area. The furnace will be loaded and programmed from an adjacent class 100 cleanroom. Furnace materials and construction shall be cleanroom compatible. 2. The furnace shall be left hand load with the gas cabinet on the right side. 3. The furnace will be installed with its back close to a wall. The furnace and gas cabinet shall be fully serviceable without accessing either from the back. 4. Tubes shall be removable from the right side, through the gas cabinet. 5. Each chamber shall be electrically independent. An electrical failure in one chamber shall not affect the other chambers within the furnace. 6. The furnace system must fit through an 87-inch tall door frame. 7. The furnace shall have two oxidation chambers and two anneal chambers. 8. Process temperatures for all four chambers shall be from 550 to 1250 degrees Celsius. 9. The furnace system shall be water cooled to minimize heat loading to room. 2.1.2 Hot section 1. Each chamber shall have three independently controlled heating elements. 2. Design of heating elements shall allow processing of 2-in to 6-in diameter wafers, with a flat zone of 12 inches in length. In the flat zone, temperature shall be uniform within +/- 0.5 degrees Celsius, for temperatures greater than 600 degrees Celsius. 3. Type R spike thermocouples are to be used. 4. Heat core shall accommodate a quartz tube with a diameter up to 235 mm OD. 5. The same type and grade of wire shall be used throughout the heating element. 6. Heating elements shall have interlocking alumina spacers that encapsulate the wire 360 degrees. 7. The elements shall not contain starch-based insulation. 2.1.3 Hardware 1. The scavenger box shall be installed in a manner to provide a tight seal to prevent leakage of any gases. 2. Scavengers are to be round or oval in shape and shall have fixed orifice settings for scavenger exhaust. 3. Oxidation tubes shall incorporate temperature-controlled bubblers for the generation of steam. The bubblers shall have auto refill. 4. 2.1.4 The following process components shall be provided: 1. Domed quartz process tubes with thermocouple stem, 150/156 mm, quantity = 62. 25 slot quartz boats for 4-in wafers, quantity = 8 3. 25 slot quartz boats for 2-in wafers, quantity = 8 4. Insulated quartz end caps, quantity = 6 5. Quartz push/pull rods, quantity = 6 6. Quartz elephant for manual loading of process tube, quantity = 6 7. Pickup fork for quartz boat, quantity = 6 2.2 Gas cabinet 2.2.1 Mass flow controllers and gas plumbing 1. The two anneal chambers shall be plumbed for argon, nitrogen, oxygen and forming gas (92% nitrogen and 8% hydrogen). The two oxidation chambers shall be plumbed for argon, nitrogen and oxygen. 2. The system shall use MKS mass flow controllers for interchangeability of parts with existing NASA equipment. Mass flow controllers shall have an accuracy of 2% and a maximum flow rate of 20 slpm. 3. All incoming gas lines shall have regulators within the gas cabinet. 4. The gas delivery system shall be designed to ensure independent tube and mass flow controller operation. All gas flows will be cycled to verify that no effect on other flows exists. 5. All plumbing and regulators to the upstream side of the mass flow controllers shall be stainless steel type 316. Welds are to be orbital. Stainless tubing connections are to be made with VCR-type fittings. 2.4 Process controllers 1. Control of each tube shall be independent, with no shared hardware, to ensure that a failure does not affect more than one tube. 2. Each tube level controller shall have a graphical color display. 3. Each controller shall have a floppy drive to save data and recipes. User shall have the ability to log all process data, including temperatures, gas flows, and alarms. 4. Each controller shall allow for storage of 10 or more recipes, without using the floppy drive. 5. Ramp rate of gas flows shall be programmable through the controllers. 6. Each controller shall have the capability of operating up to three independent loops of true cascade temperature control, using the profile (internal) thermocouples as well as the spike (external) thermocouples. 7. Controllers shall provide temperature autoprofiling. 8. Controllers shall provide auto tuning of the temperature control loop. 9. The control loop update time shall be 1 sec or less. 10. Controllers shall be capable of controlling all valves and mass flow controllers. 11. The controllers shall be capable of connecting to a host computer system. 2.5 Electrical 1. Furnace system shall use 480 V three-phase power. 2. Electrical power and electronic equipment shall be configured so that there is no need to access the back of the furnace system. 3. Hardware interlocks that automatically bring the system to a non-operating standby mode shall be interfaced with the equipment's operating system. Interlocks shall be designed to require manual reset and to allow restart only after fault correction. 4. Equipment that is not portable as defined by the NEC must have a lockable safety disconnect switch supplied as part of the machine. 5. The disconnect switch shall be located in an area away from the scavenger box. 2.6 Process specifications 2.6.1 Anneal 1. Load - 1 boat of 25 silicon wafers, 4-inch diameter 2. Idle temperature - 500 degrees Celsius 3. Ramp up rate - 10 degrees Celsius per minute 4. Process temperature - 1150 degrees Celsius 5. Stabilization time - 1150 +/- 0.5 degrees Celsius within 10 minutes 6. Dwell time - 30 minutes 7. Ramp down rate - 10 degrees Celsius per minute 2.7 Environment and Facilities 1. The seller shall supply equipment documents and dimensioned drawings to support all equipment facility requirements. Equipment facility details shall include all required utilities and connection locations, environmental conditions, and operating clearances. 2. The equipment shall be capable of operating satisfactorily in a class 10,000 clean room environment with an ambient temperature of 68 degrees Fahrenheit and a relative humidity of 45%. 2.8 Safety 1. All equipment shall be inspected for personal hazards, including unguarded electrical components with hazardous potentials of energy, high temperatures, sharp corners, unguarded moving parts, pinch points, and excessive noise. 2. The system shall be fully interlocked for equipment, process, and operator protection utilizing EPO per OSHA requirements, power supply interrupts, illogical or unsafe computer command verification, and power supply safety interlocks. 3. The furnace section shall have each process chamber electrically isolated from the others. Any possibility of shock hazard shall be reduced by the incorporation of barriered slide mounted drawers for the mounting and isolation of electrical equipment within the base of the furnace section. Drawers shall be interlocked to each individual furnace chamber to provide chamber shut down when drawer is opened. The provisions and clauses in the RFQ are those in effect through FAC 97-27. The NAICS Code and the small business size standard for this procurement are 333295 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to is required within 90 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by COB July 23, 2002 and may be mailed or faxed to Carol K. Sharp, NASA/Glenn Research Center, Mail Stop 500-309, 21000 Brookpark Road, Cleveland,OH 44135, FAX 216-433-2771 and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. As prescribed in 12.301(b)(4), insert the following clause: Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items (Dec 2001) (a) The Contractor shall comply with the following FAR clauses, which are incorporated in this contract by reference, to implement provisions of law or executive orders applicable to acquisitions of commercial items: (1) 52.222-3, Convict Labor (E.O. 11755). (2) 52.233-3, Protest after Award (31 U.S.C. 3553). (b) The Contractor shall comply with the FAR clauses in this paragraph (b) that the Contracting Officer has indicated as being incorporated in this contract by reference to implement provisions of law or Executive orders applicable to acquisitions of commercial items or components: _x_ (1) 52.203-6, Restrictions on Subcontractor Sales to the Government, with Alternate I (41 U.S.C. 253g and 10 U.S.C. 2402). __ (2) 52.219-3, Notice of Total HUBZone Small Business Set-Aside (Jan 1999). _x_ (3) 52.219-4, Notice of Price Evaluation Preference for HUBZone Small Business Concerns (Jan 1999) (if the offeror elects to waive the preference, it shall so indicate in its offer). __ (4)(i) 52.219-5, Very Small Business Set-Aside (Pub. L. 103-403, section 304, Small Business Reauthorization and Amendments Act of 1994). __ (ii) Alternate I to 52.219-5. __ (iii) Alternate II to 52.219-5. _x_ (5) 52.219-8, Utilization of Small Business Concerns (15 U.S.C. 637 (d)(2) and (3)). __ (6) 52.219-9, Small Business Subcontracting Plan (15 U.S.C. 637(d)(4)). __ (7) 52.219-14, Limitations on Subcontracting (15 U.S.C. 637(a)(14)). _x_ (8)(i) 52.219-23, Notice of Price Evaluation Adjustment for Small Disadvantaged Business Concerns (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323) (if the offeror elects to waive the adjustment, it shall so indicate in its offer). __ (ii) Alternate I of 52.219-23. __ (9) 52.219-25, Small Disadvantaged Business Participation Program-Disadvantaged Status and Reporting (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). __ (10) 52.219-26, Small Disadvantaged Business Participation Program-Incentive Subcontracting (Pub. L. 103-355, section 7102, and 10 U.S.C. 2323). _x_ (11) 52.222-21, Prohibition of Segregated Facilities (Feb 1999) _x_ (12) 52.222-26, Equal Opportunity (E.O. 11246). _x_ (13) 52.222-35, Equal Opportunity for Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212) _x_ (14) 52.222-36, Affirmative Action for Workers with Disabilities (29 U.S.C. 793). _x_ (15) 52.222-37, Employment Reports on Special Disabled Veterans, Veterans of the Vietnam Era, and Other Eligible Veterans (38 U.S.C. 4212). _x_ (16) 52.222-19, Child Labor-Cooperation with Authorities and Remedies (E.O. 13126). __ (17)(i) 52.223-9, Estimate of Percentage of Recovered Material Content for EPA-Designated Products (42 U.S.C. 6962(c)(3)(A)(ii)). __ (ii) Alternate I of 52.223-9 (42 U.S.C. 6962(i)(2)(C)). __ (18) 52.225-1, Buy American Act-Balance of Payments Program-Supplies (41 U.S.C. 10a - 10d). __ (19)(i) 52.225-3, Buy American Act-North American Free Trade Agreement-Israeli Trade Act-Balance of Payments Program (41 U.S.C. 10a - 10d, 19 U.S.C. 3301 note, 19 U.S.C. 2112 note). __ (ii) Alternate I of 52.225-3. __ (iii) Alternate II of 52.225-3. __ (20) 52.225-5, Trade Agreements (19 U.S.C. 2501, et seq., 19 U.S.C. 3301 note). __ (21) 52.225-13, Restriction on Certain Foreign Purchases (E.O. 12722, 12724, 13059, 13067, 13121, and 13129). __ (22) 52.225-15, Sanctioned European Union Country End Products (E.O. 12849). __ (23) 52.225-16, Sanctioned European Union Country Services (E.O. 12849). __ (24) 52.232-33, Payment by Electronic Funds Transfer-Central Contractor Registration (31 U.S.C. 3332). _x_ (25) 52.232-34, Payment by Electronic Funds Transfer-Other than Central Contractor Registration (31 U.S.C. 3332). __ (26) 52.232-36, Payment by Third Party (31 U.S.C. 3332). __ (27) 52.239-1, Privacy or Security Safeguards (5 U.S.C. 552a). _x (28)(i) 52.247-64, Preference for Privately Owned U.S.-Flag Commercial Vessels (46 U.S.C. 1241). __ (ii) Alternate I of 52.247-64. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than July 15, 2002. Award will be based upon overall best value to the Government, with consideration given to the factors of proposed technical merits, price and past performance; other critical requirements (i.e., delivery) if so stated in the RFQ will also be considered. Unless otherwise stated in the solicitation, for selection purposes, technical, price and past performance are essentially equal in importance. It is critical that offerors provide adequate detail to allow evaluation of their offer (see FAR 52.212-1(b). Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications - Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed - See NASA Specific Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://prod.nais.nasa.gov/cgi-bin/eps/bizops.cgi?gr=C&pin=22 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). See Note(s) __ [DELETE IF N/A]. Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html
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