MODIFICATION
66 -- Turbo Sputter Coater System
- Notice Date
- 4/24/2003
- Notice Type
- Modification
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571
- ZIP Code
- 20899-3571
- Solicitation Number
- NA1341-03-Q-0371
- Response Due
- 5/26/2003
- Archive Date
- 6/10/2003
- Point of Contact
- Joni Laster, Purchasing Agent, Phone 301-975-8397, Fax 301-975-8884, - Carol Wood, Contract Specialist, Phone 301-975-8172, Fax 301-975-8884,
- E-Mail Address
-
joni.laster@nist.gov, carol.wood@nist.gov
- Description
- Solicitation number NA1341-03-Q-0371 dated April 15, 2003 is hereby amended to respond to technical questions submitted. Question: Does NIST require a magnetron sputtering system with (3) guns? Answer: Multiple sputtering heads are specified to ensure possibility of two or three layer combination coatings such as Cr, Al, or Cr Cu. It also adds to flexibility of coating larger specimens and small specimens when NIST can select only one head to operate. A system with two individually selectable sputtering heads would be acceptable. Question: Sputtering guns need water cooling - what is meant by (no water cooling) electronic cooling system? Would a chiller be acceptable? Answer: A system with efficient electronic cooling is preferred or a system with circulating coolant. NIST wants to avoid cooling using tap water, it adds to the maintenance and increases possibility of water flooding in the lab. Question: Specifications indicate a need for a 4-6 week delivery after receipt of an order, which suggests that you have identified a chosen system that is acceptable; can you provide the Brand and Model Number? Answer: NIST requires a Turbo Sputter Coater System that meets the listed requirements. NIST is not looking for a particular brand or model, just that the system quoted meets the requirements. Commercially available systems should be available within 4-6 weeks. Due to the fact NIST's current system is down, expedited delivery is required. Question: What size vacuum chamber is required? Answer: There is a minimum specimen size of 8 inch. A bench-top sputtering system that is easy to install in a typical lab, and move from one lab to another without major space reconstruction work. The sputtering system shall be capable to reach operational conditions (vacuum, clean and gas-atmosphere) in one hour or less. Question: Is there any uniformity specifications? Answer: NIST requirements are for a cluster size of 5 nm or smaller with a uniformity of 2 % or better in thickness over a 1-inch diameter specimen. If coating is 10,000 Angstroms thick, deviation in the thickness shall be less than +- 100 Angstroms. Question: Would a used system refurbished with a one-year warranty be acceptable? Answer: NIST requires a new system with at least a one-year warranty, a longer warranty is preferred. The system will be used frequently and will be required to perform the highest quality of research. The due date for quotes, May 26, 2003 @ 3pm EST remains unchanged.
- Place of Performance
- Address: 100 Bureau Drive,, Gaithersburg, Maryland
- Zip Code: 20899
- Country: USA
- Zip Code: 20899
- Record
- SN00310998-W 20030426/030424213335 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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