Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 17, 2003 FBO #0626
SOLICITATION NOTICE

66 -- Plasma Etching System

Notice Date

8/15/2003
 

Notice Type

Solicitation Notice
 

Contracting Office

US Army Robert Morris Acquisition Center, Adelphi Contracting Division, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
 

ZIP Code

20783-1197
 

Solicitation Number

W71B7J3225H441
 

Response Due

9/29/2003
 

Archive Date

11/28/2003
 

Point of Contact

Robert Tomko, 301-394-3691
 

E-Mail Address

Email your questions to US Army Robert Morris Acquisition Center, Adelphi Contracting Division
(rtomko@arl.army.mil)
 

Small Business Set-Aside

N/A
 

Description

NA The US Army Research Laboratory (ARL) intends to solicit Unaxis USA, Inc., 10050 16th Street North, St. Petersburg, FL 33716 on a sole source basis for the purchase of a Versaline model inductively coupled plasma (ICP) basic III-V and II-VI compound semic onductor etch system for 2-, 3-, and 4-inch wafers. This system, will include a transport module, a process module, a control module and a cassette module. These modules must be capable of operating on, including being controlled by, an existing Unaxis Clu sterline 200 sputter system. This tool has both 13.56 MHz and 2 MHz rf generators, all plasma wetted surfaces temperature controlled (ambient to 180oC) and proprietary HBr/N2 etch processes for InP. Initial acceptance, training, documentation, performance specifications, installation, process set-up assistance and final acceptance testing are in accordance with the Statement of Work/Specifications to be included in the Request For Proposal. This procurement is being conducted under Simplified Acquisition Procedures (SAP) in accordance with FAR 12.203. The solicitation will be posted to the Army Single Face to Industry (ASFI) website at http://www.fedbizopps.gov. No telephone requests for the solicitation will be honored. See numbered note 22.
 

Place of Performance

Address: US Army Robert Morris Acquisition Center, Adelphi Contracting Division ATTN: AMSSB-ACC, 2800 Powder Mill Road Adelphi MD

Zip Code: 20783-1197

Country: US
 

Record

SN00403275-W 20030817/030815214353 (fbodaily.com)
 

Source

FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)

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