SOLICITATION NOTICE
66 -- Plasma Etcher
- Notice Date
- 2/10/2004
- Notice Type
- Solicitation Notice
- Contracting Office
- Department of Health and Human Services, National Institutes of Health, Nat'l Institute of Diabetes, Digestive, & Kidney Diseases, 2 Democracy Plaza, Suite 700W 6707 Democracy Blvd., MSC 5455, Bethesda, MD, 20892-5455
- ZIP Code
- 20892-5455
- Solicitation Number
- NIH-NIDDK-04-181
- Response Due
- 3/5/2004
- Archive Date
- 3/20/2004
- Point of Contact
- Desiree Harris, Purchasing Agent, Phone 301-594-7727, Fax 301-480-4226, - Desiree Harris, Purchasing Agent, Phone 301-594-7727, Fax 301-480-4226,
- E-Mail Address
-
harrisde@extra.niddk.nih.gov, harrisde@extra.niddk.nih.gov
- Description
- It is the intent of The National Institutes of Health (NIH), National Institute of Diabetes and Digestive and Kidney Diseases (NIDDK) to purchase a Plasma Etcher, Mass Flow Controller, two channel, and Chamber Gasket (2 required per unit). This Scientific Equipment must include the following specifications: The system shall have a13.56 MHz RF generator with output power controllable between 0 and 150W, The system shall have minimum of two inlet for the reaction gas with controllable flow with precise flow rate measurement capability, The system shall have the size of quartz reaction chamber of at least 7? diameter and 6? height. Also, an optional stainless steal reaction chamber, which can be readily exchanged with the quartz chamber must be available, The system shall have a stainless steal pipe system that is capable of handling aggressive gas treatment, The system shall have a capacitance manometer compatible with aggressive gas treatment, The system shall include a two-stage Fomblin vacuum pump compatible with aggressive gas treatment, and The system shall have a measurement system for both forward and reflected RF power. All requesting vendors may request a copy of the Request for Quote (RFQ) in writing or by FAX to 301-480-4226 to the Contracting Office prior to the closing date of this notice. It is anticipated that RFQ NIH-NIDDK-04-181 will be available fifteen (15) days after the publication date of this synopsis. Receipt of quotations will be due ten (10) days after the release of the RFQ. The anticipated award date is March 5, 2004. Quotations must be submitted in writing to the National Institute of Diabetes and Digestive and Kidney Diseases 6707 Democracy Blvd., Room 774B, Bethesda, Maryland 20817 Attention: Desiree Harris. FAXED quotations must contain offerors names, address, telephone number and fax number. FAX quotations will only be accepted if dated and signed by an authorized company representative.
- Record
- SN00519578-W 20040212/040210211924 (fbodaily.com)
- Source
-
FedBizOpps.gov Link to This Notice
(may not be valid after Archive Date)
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