SOURCES SOUGHT
K -- ION BEAM ETCH/DEPOSITION UPGRADE
- Notice Date
- 6/14/2006
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Region Acquisition Division, 325 Broadway - MC3, Boulder, CO, 80305-3328
- ZIP Code
- 80305-3328
- Solicitation Number
- NB818030604066DT
- Response Due
- 6/29/2006
- Archive Date
- 6/29/2006
- Description
- The National Institute of Standards and Technology (NIST), Boulder CO proposes to negotiate on a sole source basis, under the authority of 41 U.S.C. 253(c)(1) with Intlvac, 247 Armstrong Ave., Georgetown, Ontario for upgrades to two existing Ion Beam Deposition/Ion Beam Etch (IBD/IBE) systems required to fix limitations in the existing systems. The upgrades must insure that both systems operate in a similar manner and have similar maintenance requirements. The required upgrades are: 1. Corrections and improvements to the Intlvac software including: a. Two step recipe capability to allow two recipe steps that can consist of any combination of etch and deposition parameters. Both etch and deposition gun parameters, substrate parameters, and target parameters must be able to be arbitrarily set for each of the two steps. The reactive gas channel must be able to be activated during both etch and deposition processes. The existing problem in which the guns are on etching while the system is in transition from step one to step 2 must be fixed. b. Software must be implemented to set and read out crystal monitor on the Intlvac system. Software must allow for download of material parameters such as density and Z ratio and for easy calibration of deposition rates. c. Upgrade software to allow target labels to correctly update d. Modify software to allow manual indexing of target angles to allow easy target change e. Provide a soft button that will set valves to appropriate positions for gas bottle changes and purges. Provide a new set of collimated graphite grids for the 8 cm etch source in the Intlvac system, install new grids, and demonstrate etching with better uniformity and stability than the existing configuration. 2. Provide two additional sample pucks for the Intlvac system 3. Provide a 3 cm ion source and controller for the Magnetic Multilayer system that has compatible operation and maintenance as the Intlvac system. 4. Provide two additional flow controllers for Ar and Oxygen that are compatible with the existing ones installed on the Intlvac chamber. 5. Provide a backing pump for the Magnetic Multilayer system that has same specifications, compatible operation, and similar maintenance requirements as the on the Intlvac system. Intlvact is the only company that can provide the required upgrade technology because the upgrades require access to proprietary Intlvac software and engineering drawings that are not available to other companies. To insure all components operate correctly on existing systems, the upgrade package must be provided by Intlvac. This procurement is being conducted per FAR Part 13, Simplified Acquisition Procedures (under $100,000). Information submitted in response to this notice will be used solely to determine whether on not use of competitive procedures to fulfill this requirement would be in the Government's best interest and must address qualifications pertinent to this requirement. Questions should be submitted in writing to the contracting officer either by fax or e-mail before June 29, 2006. Anticipated award date is June 30, 2006.
- Place of Performance
- Address: 325 Broadway, Boulder, CO
- Zip Code: 80305
- Country: USA
- Zip Code: 80305
- Record
- SN01069268-W 20060616/060614220447 (fbodaily.com)
- Source
-
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