SOLICITATION NOTICE
66 -- Upgrade of an Existing Low-Pressure Chemical Vapor Deposition (LPCVD) Furnace System
- Notice Date
- 6/28/2006
- Notice Type
- Solicitation Notice
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- Reference-Number-11-0114-06
- Archive Date
- 8/1/2007
- Description
- The Naval Research Laboratory (NRL) intends to negotiate a contract, on an other than full and open competition basis, with MRL Industries, 19500 Nugget Road, Sonora, CA 95370 for the in-house upgrade of an existing NRL owned low-pressure chemical vapor deposition (LPCVD) furnace system to provide silicon oxide thin films. The upgrade is to be made to the MRL Industries Model 6500 795 856 R00 dual-stack furnace system presently configured with a lower tube for silicon nitride/polysilicon LPCVD and an upper tube configured for atmospheric pressure wet-oxidation of silicon. The upgrade of the present dual stack configuration will convert the high-temperature wet-oxidation furnace to a low-temperature oxide (LTO) furnace and utilize components of the wet-oxidation furnace to construct a stand-alone bench-top high-temperature wet-oxidation furnace. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm See Numbered Note 22.
- Place of Performance
- Address: Naval Research Laboratory, 4555 Overlook Ave., SW, Washington
- Zip Code: 20375
- Country: US
- Zip Code: 20375
- Record
- SN01079626-W 20060630/060628221348 (fbodaily.com)
- Source
-
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