SOLICITATION NOTICE
66 -- Reactive Ion Etchers Plasma System
- Notice Date
- 6/29/2006
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, DC, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-06-R-HA04
- Response Due
- 7/17/2006
- Archive Date
- 7/18/2007
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulations (FAR) Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. The solicitation, N00173-06-R-HA04, is issued as a Request for Proposal (RFP). The solicitation document and incorporated provisions and clauses are those in effect through FAC 2005-09 and DFARS Change Notice 20060521. The associated North American Industry Classification System (NAICS) code is 334516 and the small business size standard is 500. The US Navy Research Laboratory (NRL) seeks to purchase two clamshell-type Reactive Ion Etcher (RIE) plasma systems. One system must be equipped to handle corrosive gases like chlorine and hydrogen bromide and the other system must handle fluorine-based etching chemistries using sulfur hexafluoride, tetrafluoromethane and trifluoro-methane. Two each of the following system must be provided and shall consist of CLIN 0001 ? Process Chamber; CLIN 0002 ? Vacuum Pump; CLIN 0003 ? Pressure Measurement and Control; CLIN 0004 ?RF Plasma Generator; CLIN 0005 ? Microprocessor Control and Remote Operation Interface Software; CLIN 0006 ? Mass Flow Controllers; CLIN 0007 ? Endpoint Detection; CLIN 0008 - Installation and Training; and CLIN 0009 ? Warranty. The Optional Items include: CLIN 0010 ? Pumping options for CLIN 0002; CLIN 0011 ? Manual or automatic isolation valve for CLIN 0003; CLIN 0012 ? optional mass flow controllers for CLIN 0006 as described under Specification #6; and CLIN 0013 ? optional spare parts and accessories as described in Specification #9. The complete specification and/or other information required for this combined synopsis/solicitation is available at http://heron.nrl.navy.mil/contracts/rfp/06HA04.htm. Delivery and acceptance is at NRL, Washington, D.C. 20375, FOB Destination. Delivery shall be no later than one hundred twenty (120) days from date of award. The provision at 52.212-1, Instructions to Offerors-Commercial, applies to this acquisition. The provision at FAR 52.212-2, Evaluation--Commercial Items is incorporated. The Government intends to award a contract resulting from this solicitation to that responsible offeror whose offer conforming to the solicitation will be the most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate the offers: 1. Technical capability of the item offered to meet the Government requirement; 2. price; and 3. past performance. Technical and past performance when combined, are more important than price. The Government will evaluate offers for award purposes by adding the total price for all options to the total price for the basic requirement. The Government may determine that an offer is unacceptable if the option prices are significantly unbalanced. Evaluation of options shall not obligate the Government to exercise the option(s). Offerors must complete and submit with its proposal, FAR 52.212-3 Offeror Representations and Certifications--Commercial Items and DFARs 252.212-7000 Offeror Representations and Certifications--Commercial Items., which are identified as B and available electronically at: http://heron.nrl.navy.mil/contracts/repsandcerts.htm The clause at FAR 52.212-4, Contract Terms and Conditions-Commercial Items and FAR 52.212-5, Contract Terms and Conditions Required To Implement Statutes or Executive Orders--Commercial Items, applies to this acquisition. The additional clauses cited within this clause are applicable: FAR 52.203-6, 52.219-4, 52.222-3, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-36, 52.222-37, 52.222-39, 52.225-1, 52.225-3, and 52.232-33 . The DFARs clause at 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items applies to this acquisition. The additional clauses cited within this clause are applicable: 52.203-3, 252.225-7012, 252.227-7015, 252.232-7003, 252.247-7023, and 252.247-7024. The following additional FAR and DFARs clauses apply: 52.204-7 Central Contractor Registration, 252.204-7004 Alternate A and 252.211-7003. The following additional FAR clause applies: 52.215-5. Paragraph ( c) is completed as follows: (202) 767-5896 (primary) or (202) 767-0430 (alternate) In addition, proposals may be transmitted by email to Hilda.abdon@nrl.navy.mil (primary) or jan.bays@nrl.navy.mil (alternate) in either Microsoft Word or PDF formats. If facsimile proposals are authorized, only one copy is required. Contracting Officers may request offeror(s) to provide the complete original signed offer at a later date. All EIT supplies and services provided under any resultant contract must comply with the applicable accessibility standards issued by the Architectural and Transportation Barriers Compliance Board at 36 CFR part 1194 (see FAR Subpart 39.2). Electronic and information technology (EIT) is defined at FAR 2.101. Any resultant contract will be DO Rated under the Defense Priorities and Allocations System (DPAS). The Contract Specialist must receive any questions concerning the RFP no later than ten (10) business days before the response date of this solicitation. An original and two(2) copies of the offeror proposal shall be received on or before the response date noted above, 4:00 P.M., local time at the NRL address above, Attn: Contracting Officer. The package should be marked with the solicitation number, due date and time. The U.S. Postal Service continues to irradiate letters, flats, Express and Priority Mail with stamps for postage and other packages with stamps for postage destined to government agencies in the ZIP Code ranges 202 through 205. Due to potential delays in receiving mail, offerors are encouraged to use alternatives to the mail when submitting proposals. Other business opportunities for NRL are available at our website http://heron.nrl.navy.mil/contracts/rfplist.htm.
- Place of Performance
- Address: Contractor's Facility
- Record
- SN01080587-W 20060701/060629221435 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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