Loren Data's SAM Daily™

FBO DAILY ISSUE OF AUGUST 05, 2006 FBO #1713
MODIFICATION

66 -- Reactive Ion Etching System

Notice Date

8/3/2006
 

Notice Type

Modification
 

NAICS

333295 — Semiconductor Machinery Manufacturing
 

Contracting Office

Department of Commerce, National Oceanic and Atmospheric Administration (NOAA), Mountain Region Acquisition Division, 325 Broadway - MC3, Boulder, CO, 80305-3328
 

ZIP Code

80305-3328
 

Solicitation Number

RA1341-06-RP-0211
 

Response Due

8/15/2006
 

Archive Date

11/1/2006
 

Small Business Set-Aside

Total Small Business
 

Description

Amendment 0001 Combined Synopsis/Solicitation RA1341-06-RP-0211 This Amendment provides questions received and responses provided by the Government. It is provided for clarification and informational purposes only. The due date for proposals is not extended as a result of this amendment. Q1. Will there be house water available to help cool this system? R1. There will be approximately 20C house chilled water available. Q2. On the system description, 2. Load-Lock chamber, d. it states that ?an expansion port for diagnostic purposes? is desired. It is not clear exactly what is being requested here. Can we get some more specific clarification on this? R2. An extra 2.75? CF port for the attachment of, for example, an RGA. Q.3 On system description 4. Gas Handling b. it states ?Data shall be provided in proposals to support the quoted uniformity.? We usually support this by running samples for the customer so they can inspect the samples for themselves and verify the results. Is there some other means of supporting this other than stating that we can and have met this uniformity spec and we are glad to guarantee it? Or would you like to send us samples so we can demonstrate that we meet this uniformity spec? Please clarify what is needed here and we will gladly provide it. R3. Any previous data from other tools of yours will suffice. The Government would like to see something like a plot of etch rate vs. radius of wafer for some standard etch process. Q4. On system description 5 Etching performance, it states "Data shall be provided in proposals for two baseline processes on this system which simultaneously meeting the following criteria", and it goes on to enumerate some process specs. I want to ensure I fully understand what is being requested: are you asking to provide our processes for etching these 2 materials? We can meet these requirements and can provide our processes, but we don't usually give out our processes unless the customer is purchasing a system from us. Unfortunately, we have had it occur where we gave a process away to a potential customer, who then went and purchased a less expensive system from a company that offered no process support, and they just took the process that we had developed and put it in the other system; as you can imagine, this gave us some misgivings about giving out our proprietary processes without a PO. Be that as it may, please clarify exactly what you would like us to provide and we will provide it. R4. The Government does not need the specifics of the process (i.e. gasses, flows, pressures, powers), but it does need to know that the tools it is buying will be able to perform these processes. If the etching data is supplied with the processes denoted by "Process A", "B", etc., this will suffice. However, if the Government buys the tool, it expects that these processes will be fully disclosed. Q5. Lastly, on system description 7. Wafer handling, d. it states "for a 5 minute, 200W etch, the substrate temperature shall not exceed 60C. Data shall be provided that confirms this." We can measure this and state that we can do it, but is that the confirmation that you want? More accurate verification on this point is already built into the acceptance spec, which states that "Final payment will not be made until the system has passed all the tests performed at the government site." Again, please let us know what you would like us to present you and we will do so. R5. Please measure and report a temperature for such a process. The Government accepts any data given in a proposal. We will measure this during the acceptance procedure and if the system does not meet this, it will not be accepted.
 

Place of Performance

Address: 325 Broadway, Boulder, CO

Zip Code: 80305-3328

Country: UNITED STATES
 

Record

SN01105149-W 20060805/060803220419 (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

---

| FSG Index  |  This Issue's Index  |  Today's FBO Daily Index Page |