SOLICITATION NOTICE
66 -- Topography Coater System
- Notice Date
- 8/3/2006
- Notice Type
- Solicitation Notice
- NAICS
- 333298
— All Other Industrial Machinery Manufacturing
- Contracting Office
- RDECOM Acquisition Center - Adelphi, ATTN: AMSSB-ACA, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-06-R-0012
- Response Due
- 8/14/2006
- Archive Date
- 10/13/2006
- Small Business Set-Aside
- N/A
- Description
- (1) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; propo sals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-06-R-0012. (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FA C 01-27). (iv) The associated North America Industry Classification System (NAICS) Code is 333298 and the Business Size Standard is 500 employees. (v) The following is a list of contract line item numbers and items, quantities and units of measure: CLIN NO. 0001 DESCRIPTION Topography Coater system QUANTITY One UNIT OF MEASURE Each (vi) Description of requirements: Commercially available Topography Coater for photoresist spray coating piece-part to 6-inch wafer substrates. System shall be software controlled, be capable of processing two different resists with no tooling modificatio ns, and have the following capabilities: piece-part, 100mm, and 150 mm wafer processing; two resist dispensing; self cleaning capability for bowl and chuck clean; edge bead removal; backside rinse; photoresist storage; and computer control. The system sha ll have the following salient characteristics: (1) semiautomatic coating system with automatic substrate processing and manual substrate load and unload; (2) capable of processing piece-part to 150mm wafers and 6 x6 square substrates. Specific chucking to be delivered for piece-parts, 100mm wafers, and 150mm wafers; (3) computer controlled process with graphical user interface with recipe management of up to 99 programs, programmable user levels, process parameter display and control and error recovery and logging; (4) Class 100 clean room compatible cabinetry with media drawer and spill sensor, process station, computer control, and facility distribution panel for power, air, nitrogen, vacuum and exhaust; (5) heated vacuum chuck with temperatures up to or greater than 80?C; (6) spin chuck with speeds up to or greater than 2000 rpm and accelerations of 1000 rpm or greater; (7) process bowl shall contain an exhaust and drain collection for excess resist, collection tank shall have a full level sensor; (8) t wo nozzle spray dispense system with flow control and autoclean capability for processing with two different photoresists without cross contamination; (9) system shall have a cleaning dispense system for edge bead removal, bowl clean, and chuck clean; (10) backside wafer rinse capability, (11) all software upgrades developed and released within 3 years after the acceptance date shall be provided at no cost; (12) system must deliver consistent conformal coatings on various structures such as 90? corners, DRI E structures, KOH etched cavities, and v-grooves and (12) process multiple resists to include AZ 5000 and AZ9000 series resists. Final acceptance testing at the Zahl Physical Sciences Building, Army Research Laboratory, Adelphi, MD will be based on demons tration of spray deposition of photoresist. Two working days of operation and maintenance training at Adelphi, MD will be provided for up to 4 participants. Training will take place after the tool is operational. The contractor shall provide telephone te chnical support during weekday business hours (8:00 AM to 5:00 PM EST) at no additional cost to the Government, both during and after the warranty period. The contractor shall provide on-site technical support for warranty repairs during weekday business hours (8:00 AM to 5:00 PM EST) at no additional cost to the Government during the warranty period. Contractor must have Field Service Engineers residing in and deployed within the continental United States to ensure timely availability to address any warr anty and/or post warranty system repairs. Two complete sets of operationa l manuals and electrical diagrams, in English, shall be provided. One set shall be on clean room paper or on CD.15. The contractor shall provide a one-year warranty that shall include parts, labor and process support. The warranty period shall begin aft er final acceptance of the system. (vii) Delivery of system, installation, testing and training shall all be completed 180 calendar days after contract award. Delivery is FOB Destination. (viii) The provision at FAR 52.212-1, Instructions to Offerors - Commercial Items applies to this solicitation. The following agenda have been attached to this provision: None. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this solicitation. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: Technical, past performance and price. Technical and past performance are of equal importance and when combined are significantly more important than price. The technical evaluation will be a d etermination as to whether the proposed system meets the salient characteristics listed in (vi) above. Technical evaluation shall be based on information furnished by the offeror. The government is not responsible for locating or securing any informatio n, which is not identified in the proposal. To ensure sufficient information is available, offerors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the government to determine whether the product meets the salient characteristics. If the offeror proposes to modify a product so as to make it conform to the requirement of this solicitation the proposal shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or government agencies. Past performance will consider the history of the offeror in providing a product that meets specifications, meeting delivery schedules and warranty and maintenance reputation. Offerors must include records of three recent sales and identify a point of contact for each by providing a n ame and telephone number. Price will be evaluated on a best value basis. The government will award a contract to the offeror whose offer conforms to this solicitation and will be most advantageous to the government, price and other factors considered. Th e government reserves the right to make an award without discussions and to make award to other than the lowest price. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial It ems, and DFARS 252.212-7000, Offeror Representations and Certifications - with its offer. (xi) The clause at FAR 52.212-4 applies to this acquisition. The following agenda have been attached to the clause: None. (xii) The clause at FAR 52.212-5 applies to this acquisition. The following additional FAR clauses cited in this clause are applicable: FAR 52.203-6; FAR 52.219.8; FAR 52.222-21; FAR 52.222-26; FAR 52.222-35, FAR 52.222-36, FAR 52.232-33 and FAR 52.232-36. (xiii) The clauses at DFARS 252.212-7 000 and 252.212-7001apply to this acquisition. The following DFARS clauses cited in 252.212-7001 apply: DFARS 252.225-7001; DFARS 252.225-7014; DFARS 252.225-7016; DFARS 252.227-7015; DFARS 252.227-7037; DFARS 252.232-7003 and DFARS 252.247-7024. Clauses and provisions are incorporated by reference and apply to this acquisition. Clauses and provisions can be obtained at http://www.arnet.gov. (xiv) Offers are due on 14 August 2006, by 1100 hours, at US Army Research Laboratory, RDECOM-Adelphi, Contracting Division, AMSRD-ACC-A, Adelphi, MD 20783. Electronic offers are encouraged sent via email to rtomko@arl.army.mil. (xv) For information regarding this solicita tion, please contact Robert Tomko at (301) 394-3691 or FAX (301) 394-1891.
- Place of Performance
- Address: RDECOM Acquisition Center - Adelphi ATTN: AMSRD-ACC-A, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Country: US
- Zip Code: 20783-1197
- Record
- SN01105587-W 20060805/060803222024 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |