SOLICITATION NOTICE
66 -- Film Stress Measurement System
- Notice Date
- 9/5/2007
- Notice Type
- Solicitation Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD, 20899-1640, UNITED STATES
- ZIP Code
- 00000
- Solicitation Number
- NB620010-7-06132
- Response Due
- 9/14/2007
- Archive Date
- 9/16/2007
- Description
- THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THE SOLICITATION IS BEING CONDUCTED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. This solicitation is a Request for Quotation (RFQ). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-18. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size standard of 500 employees. However, this requirement is being competed on an unrestricted basis. Background The Center of Nanoscale Science and Technology (CNST) at the National Institute of Standards and Technology (NIST), is a multi-user facility that provides hands-on access to state-of-the-art Nanofabrication equipment and processes to researchers of all levels of knowledge from novice to expert and from both inside and outside NIST. The tools within the facility are used by the researchers on a pay-by-use basis. Currently CNST requires a non-destructive, accurate and fast film stress measurement system to measure the stresses of the thin films, coated by plasma enhanced chemical vapor deposition (PECVD), sputtering or e-beam evaporation, on the planar substrates up to 200mm diameter sizes. CNST will be using this system to serve for the users with a variety of applications. Thus, this system must be able to measure many types of materials on a large variety of substrate materials, sizes and thicknesses. Broad material coverage, accurate measurement, fast data processing and variable sample sizes and temperatures are the basic requirements for the new system. The required Contract Line Items (CLINS) are; Contract Line Item 0001: Film Stress Measurement System that meets or exceeds minimum specifications; Quantity: 1; Unit; Each Contract Line Item 0002: Operating Training, to include basic operation, maintenance and system for up to 3 persons; Quantity; 1; Unit Delivery No later than 8 weeks after acceptance of order Warranty Standard Commercial warranty at a minimum. Maintenance: The Contractor shall include any maintenance/upgrades that are customarily included with the system. Minimum Specifications for Item No. 0001: System - Light source shall provide at least two wavelengths. - Wafer scan time shall be around 6s for the sizes up to 200mm. - Scan range shall be from 50mm to 200mm or broader. - Minimum scan step shall be less than 0.02mm. - Scan accuracy shall be less than 2.5% - Maximum points of scan shall be more than 1250. - Selected local area scan is required. - Wafer stage (holder) must accommodate 50, 75, 100, 125, 150, 200mm circular and other random shape and sizes. Broader size coverage is preferred. - Sample stage shall hold both flexible and hard substrates. - Sample stage shall hold both thin and thick substrate (from 0.1mm to 5mm or broader range). - Sample stage (holder) temperature must be adjustable (from -65 to 500?C or broader range) - The temperature accuracy shall be less than 1?C. - Sample temperature stabilization time shall be less than 2min. - Temperature variation between sample surface and stage shall be less than 1 ?C. - Temperature ramping speed shall be no less than 15 ?C/min. going up and down. - Cooling from 500 ?C to 100 ?C shall take less than 60min. controlled by software. - Cooling from 500 ?C to 100 ?C shall take less than 30min. by using liquid nitrogen. - Sample chamber must be equipped with inert gas lines to provide N2 or Ar gas to prevent the samples from oxidization and other side reactions during the measurements. - Calibration sample must be provided - Past experienced for the stress measurement (material, data analysis, experimental conditions) . General Information about the item/service Acceptance/Inspection: NIST reserves the right to inspect CLIN 0001 at the factory in person and via specified samples. Tests samples will be provided and defined by NIST. Once the facilities hookups have been completed by NIST, the vendor will perform the initial tool checkout, start-up and debug of the tool. Final acceptance for the system shall not occur until the system is fully installed at NIST and the sample measurements are demonstrated at NIST the installed tool. Software - Window XP based operation system is required. - Tool functions shall be fully controllable from user-interface software. - Software shall contain the databases for both coating and substrate materials. - Windows for the new material input is required. - Software must have data analysis for the wafer/substrate topology. - Software must be able to covert the surface topology to the stresses. - Multi-layer coating stress analysis capability is required. - Software must be able to provide the surface topology and wafer stress map. - Software must be upgraded every time when new software is available Safety and Interlocks -The system must be equipped with proper interlocks to prevent damage by mis-operation. -The laser must comply with 21 CFR, Chapter 1, subchapter J. Training -Contractor shall provide all the necessary in-house (NIST) training for at least three operators. -Training shall include hardware/software operation and basic maintenance and minor system modifications if necessary. Quotation Submission Instructions: The Offeror shall include the following in their quote: (1) The solication number; (2) The name, address, and telephone number of the offeror; (3) A technical description of the items being offered in sufficient detail to evaluate compliance with the requirements in the solicitation. This may include product literature, or other documents, if necessary; (4) FOB ? Destination firm-fixed price fulfillment of the requirement and any discount terms; (5) A completed copy of the representations and certificatios at FAR 52.212-4 (see FAR 52.212-3(k) for those representations and certifications that the offeror shall complete electronically); (6) Acknowledgment of Solicitation Amendments; (7) If the quote is not submitted on the SF 1449, include a statement specifying the extent of agreement with all terms, conditions, and provisions included in the solicitation. Quotes that fail to furnish required representations or information, or reject the terms and conditions of the solicitation may be excluded from consideration. EVALUATION FACTORS FOR AWARD Award shall be made to the offeror whose quote offers the best value to the Government, price and other factaors considered. The Government will evaluate quotations based on the following evaluation criteria: Extent to which offered solution meets or exceeds minimum specifications for Item Nos 0001 and 0002; and price. The following provisions apply to this acquisition: 52.212-1 Instructions to Offerors-Commercial Items; 52.212-3 Offerors Representations and Certifications- Commercial Items. The following clauses apply to this acquisition: 52.204-7 Central Contractor Registration; 52.212-4 Contract Terms and Conditions/Commercial Items; 52.212-5 Contract Terms and Conditions Required to Implement Statutes or Executive Orders/Commercial Items including subparagraphs: (15) 52.222-3, Convict Labor; (16) 52.222-19 Child Labor / Cooperation With Authorities And Remedies; (17) 52.222-21, Prohibition of Segregated Facilities; (18) 52-222-26, Equal Opportunity; (20) 52.222-36, Affirmative Action for Workers with Disabilities; (25) 52.225-3 Buy American Act - Free Trade Agreements - Israeli Trade Act; ALTERNATE II (27) 52.225-13 Restriction on Certain Foreign Purchases; (32) 52.232-33 Payment by Electronic Funds Transfer ? Central Contractor Registration. Note: Pricing for CLINS 0001 CLINS 0002 shall be FOB destination All quotes shall be received not later than 3:00 PM local time, on September 14, 2007 at the National Institute of Standards & Technology, Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, MD 20899-1640, Attn: Janice Moten. Any questions or concerns regarding this solicitation should be forwarded in writing via e-mail to the Janice.Moten@nist.gov. Because of heightened security, FED-EX, UPS, or similar delivery methods are the preferred method of delivery of quotes. If quotes are hand delivered, delivery shall be made on the actual due date through Gate A, and a 24-hour (excluding weekends and holidays) prior notice shall be made to the Contracts Office at 301-975-6984. NIST is not responsible for late delivery due to the added security measures. In addition, offerors/quoters who do not provide 24-hour notification in order to coordinate entrance to the NIST campus shall assume the risk of not being able to deliver offers/quotes on time. The Government is not responsible for the amount of time required to clear unannounced visitors, visitors without proper identification and without complete information that would allow delivery (i.e. point of contact, telephone POC, bldg., room number, etc.). If 24-hour notification was not provided, it is suggested your company representative or your courier service arrive at NIST at least 90 minutes prior to the closing time in order to process entry to the campus through the visitor center and complete delivery. Notice shall include the company name, name of the individual making the delivery, and the country of citizenship of the individual. For non-US citizens, the following additional information will be required: title, employer/sponsor, and address. Please ensure that the individual making the delivery brings photo identification, or they will be denied access to the facility. E-mailed quotes are acceptable. Faxed quotes will NOT be accepted.
- Place of Performance
- Address: 100 Bureau Drive, M/S 6200, Gaithersburg, Maryland 20899-6200
- Zip Code: 20899-6200
- Country: UNITED STATES
- Zip Code: 20899-6200
- Record
- SN01395034-W 20070907/070905220420 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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