SOLICITATION NOTICE
66 -- Direct-Write Electron Beam Lithography System
- Notice Date
- 8/15/2008
- Notice Type
- Modification/Amendment
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- SB1341-08-RQ-0492
- Response Due
- 8/22/2008 12:00:00 PM
- Archive Date
- 9/6/2008
- Point of Contact
- Darlene Dorsey-Coen, Phone: 3019753955, Todd D Hill, Phone: 301-975-8802
- E-Mail Address
-
Darlene.DorseyCoen@nist.gov, todd.hill@nist.gov
- Small Business Set-Aside
- N/A
- Description
- The purpose of this amendment is to answer vendor questions. As a result, the solicitation is hereby amended as follows: 1. Question: What is the difference between Pattern Placement Accuracy and Registration Accuracy ? Answer: Pattern placement accuracy means feature location with respect to an absolute grid, while registration is with respect to an existing feature or registration mark. All other terms and conditions of the solicitation remain unchanged. The purpose of this amendment is to answer vendor questions. As a result, this solicitation is amended as follows: 1. Question: Acoustic noise -- Was measurement done in the mode of "A weighted sound pressure level", "B weighted sound pressure level", "C weighted sound pressure level" or "Flat"? Answer: Measurements were done in Flat mode (dBF) 2. Question: Floor vibration -- Range in 1 to 10Hz -- Can we have more detailed data in the range in 1 to 10Hz? Can we have a graph- Graph (Time VS Displacement (or velocity)) Answer: No further information is available, We are unable to convert the graphical data to a Time vs Displacement plot. 3. Question: Magnetic field -- We would like to ask if the customer has done the inspection for DC EMF. Answer: The DC EMF for the intended location of the e-beam has been measured to be 0.8 mGauss peak to peak. All other terms and conditions of the solicitation remain unchanged.
- Web Link
-
FedBizOpps Complete View
(https://www.fbo.gov/?s=opportunity&mode=form&id=72bcb3808d388d3c45b6731e9e3e4767&tab=core&_cview=1)
- Place of Performance
- Address: 100 Bureau Drive, Mail Stop 1640, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN01642366-W 20080817/080815225539-72bcb3808d388d3c45b6731e9e3e4767 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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