SOURCES SOUGHT
66 -- Critical Dimension Measurement Microscope
- Notice Date
- 2/12/2010
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- CAW-10-0002
- Archive Date
- 3/11/2010
- Point of Contact
- Carol A. Wood, Phone: 301-975-8172, Carol A. Wood, Phone: 301-975-8172
- E-Mail Address
-
carol.wood@nist.gov, carol.wood@nist.gov
(carol.wood@nist.gov, carol.wood@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- This is a SOURCES SOUGHT NOTICE for market research purposes. THIS IS NOT A REQUEST FOR PROPOSALS. The National Institute of Standards and Technology (NIST) seeks a critical dimension measurement microscope to use in a research-based Nanofabrication facility. The microscope will be used to measure various critical dimensions on a wide array of substrates and materials. The microscope must be capable of measuring linewidths, pitch, spacing and various overlay patterns. After the results of this market research are obtained and analyzed and specifications are developed for a critical dimension measurement microscope that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small business manufacturers are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. The critical dimension measurement microscope must meet or exceed the following technical requirements: 1. Stage •Accommodate small pieces, 75mm, 100mm and 150mm wafers. Accommodate square photomasks up to 6 inch by 6 inch. •Both an automated and manual stages will be considered. •Stage travel of 150mm by 150mm 2. Resolution •Measure feature sizes down to 0.5 microns or better 3. Optics •Options for several objectives up to 100X 4. Focus and automation •Automatic focus at measuring site 5. Software and computer •Programmable measurement routines •X and Y measurements •Output data into spreadsheet or other common formats •Modern computer to control system and monitor 6. Optional •Automated stage •CAD data import •Pattern recognition •Z height measurement •Will consider all other options NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company’s size classification in any response to this notice. Companies that manufacture these types of microscopes are requested to e-mail a detailed report describing their abilities to carol.wood@nist.gov no later than the response date for this sources sought notice. The report must include achievable specifications and any other information relevant to your product or capabilities. Also, the following information must be provided as part of the response to this sources sought notice: 1. Name and business size of the company that manufactures the microscope for which specifications are provided; 2. Name of company(ies) that are authorized to sell the microscope, their address, and a point of contact for the company (name, phone number, fax number and email address); 3. Indication of number of days, after receipt of order that is typical for delivery of such a microscope; 4. Indication of whether each microscope (including installation) for which specifications are sent to carol.wood@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s); 5. Any other relevant information that is not listed above which the Government should consider in finalizing its market research. All documentation must be sent to Carol A. Wood, Contract Specialist, at the National Institute of Standards and Technology, Acquisition Management Division, 100 Bureau Drive, Mail Stop 1640, Gaithersburg, MD 20899-1640. E-mail address: CAROL.WOOD@NIST.GOV. Submission must be received not later than 3:00 PM local time on February 24, 2010.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/CAW-10-0002/listing.html)
- Place of Performance
- Address: Ship to:, NIST, 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02064907-W 20100214/100212234953-b853f92997c212e6368214a46e0964bd (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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