SOURCES SOUGHT
39 -- Specialty Gas Cabinet
- Notice Date
- 8/5/2010
- Notice Type
- Sources Sought
- NAICS
- 325120
— Industrial Gas Manufacturing
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, 88 CONS/PK, 1940 ALLBROOK DRIVE, WRIGHT-PATTERSON AFB, Ohio, 45433-5309, United States
- ZIP Code
- 45433-5309
- Solicitation Number
- F4FBBL0194A002
- Archive Date
- 10/1/2010
- Point of Contact
- Sean D. Miller, Phone: 9375224620, Eugene D Harvey, Phone: 937-522-4548
- E-Mail Address
-
sean.miller@wpafb.af.mil, eugene.harvey@wpafb.af.mil
(sean.miller@wpafb.af.mil, eugene.harvey@wpafb.af.mil)
- Small Business Set-Aside
- N/A
- Description
- THIS IS A REQUEST FOR A CAPABILITY STATEMENT ONLY - LIMIT 10 PAGES RYDD requires a gas cabinet to deliver Chlorine (Cl2) and Boron Trichloride (BCL3) gases for an Inductively Coupled Reactive Ion Etch system. This cabinet is required to have gas sensors for both gases to effectively shut off the gas bottles in the event of gas leaking into the cabinet. The delivery manifolds are required to have the capability of automatically purging the gases from the manifolds using high purity nitrogen (N2) to allow for a safe and reliable bottle exchange. All gas lines and fittings are required to be Swagelock brand in order to be compatible with existing cabinets. The BCl3 and Cl2 bottles will be half height and, while in use, stored on a shelf. Room for an additional bottle of each shall be available in the same cabinet. The N2 bottle will be a full height bottle and is required to be stored in the cabinet and fully plumbed in to the system. All exhaust and fire suppression will be supplied by the buyer. The seller shall include installation of the process gas lines from the cabinet to the tool manifold. These gas lines will be double walled stainless steel exhausted to the cabinet. (less than 20 feet) User training will be included with the installation. THIS IS A REQUEST FOR A CAPABILITY STATEMENT ONLY - LIMIT 10 PAGES
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/USAF/AFMC/88 CONS/F4FBBL0194A002/listing.html)
- Place of Performance
- Address: Wright Patterson AFB, Wright Patterson AFB, Ohio, 45433, United States
- Zip Code: 45433
- Zip Code: 45433
- Record
- SN02229994-W 20100807/100805235212-10ea64a9ba9f15810b920b4c47d2dcfc (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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