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FBO DAILY ISSUE OF FEBRUARY 12, 2012 FBO #3732
SOURCES SOUGHT

66 -- SIMS End Point Detector for 4Wave Ion Beam Etch System

Notice Date

2/10/2012
 

Notice Type

Sources Sought
 

NAICS

334516 — Analytical Laboratory Instrument Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

AMD-12-SS17
 

Archive Date

3/3/2012
 

Point of Contact

Paula Wilkison, Phone: 301-975-8448, Patrick Staines, Phone: (301)975-6335
 

E-Mail Address

paula.wilkison@nist.gov, patrick.staines@nist.gov
(paula.wilkison@nist.gov, patrick.staines@nist.gov)
 

Small Business Set-Aside

N/A
 

Description

The National Institute of Standards & Technology (NIST) seeks information on commercial vendors that are capable of providing a SIMS (Secondary Ion Mass Spectrometer) end point detector for an existing 4Wave ion beam etch system. The CNST NanoFab at NIST has an existing 4 Wave Ion Beam Etch System which it purchased in 2010 under Contract SB1341-10-SU-1148. This tool makes use of a broad Argon ion beam to slowly and uniformly mill (etch) metal layers deposited on (typically) silicon wafers up to 150 mm in diameter. NIST now has a requirement to integrate a SIMS end point detector into this existing system. The SIMS (Secondary Ion Mass Spectrometer) analyzes the atoms emitted by the wafer undergoing the etch and is used to determine precisely when the etch process should be terminated. The required SIMS end point detector shall seamlessly integrate with NIST's existing 4Wave ion beam etch system using the specific physical/geometrical configuration relative to the wafer which is proprietary to 4Wave. In addition, the SIMS hardware shall be physically compatible with the part of the existing system which is specifically machined to receive it. The SIMS software shall be capable of integration into the existing Ion Beam Etch system software, which is proprietary to 4Wave. After results of this market research are obtained and analyzed and specifications are developed for the replacement of components for the SIMS End Point Detector for 4Wave Ion Beam Etch System, NIST may conduct a competitive procurement and subsequently award a Purchase Order. If at least two qualified small businesses are identified during this market research stage, then any competitive procurement that resulted would be conducted as a small business set-aside. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification in any response to this notice. Companies capable of providing a SIMS End Point Detector for 4Wave Ion Beam Etch System are requested to email a detailed report describing their capabilities to paula.wilkison@nist.gov no later than the response date for this sources sought notice. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that provides the component for which specifications are provided. 2. Name of company(ies) that are authorized to provide the component, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such component. 4. Indication of whether the component for which specifications are sent to paula.wilkison@nist.gov is currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research. Point of Contact Paula Wilkison, Contracting Specialist, Phone (301) 975-8448, Email paula.wilkison@nist.gov
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-12-SS17/listing.html)
 

Place of Performance

Address: 100 Bureau Drive, MS 1640, Gaithersburg, Maryland, 20899, United States

Zip Code: 20899
 

Record

SN02673101-W 20120212/120210233611-5879fbe0a17b82d571b57906f429933e (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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