SOURCES SOUGHT
66 -- LASER PATTERN GENERATOR
- Notice Date
- 2/17/2012
- Notice Type
- Sources Sought
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
- ZIP Code
- 20899-1640
- Solicitation Number
- AMD-12-SS18
- Archive Date
- 3/20/2012
- Point of Contact
- Judy K. Pace, Phone: 3019752752, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
judy.pace@nist.gov, patrick.staines@nist.gov
(judy.pace@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The National Institute of Standards & Technology (NIST) seeks information from vendors that are capable of providing a laser pattern generator for the fabrication of photomasks and to direct-write lithographic patterns onto various substrates. The system will be sited and used in a multi-user facility to support scientific and technical research projects at the NIST Center for Nanoscale Science and Technology (CNST) NanoFab. The CNST NanoFab is a state-of-the-art nanofabrication laboratory and has various lithography tools that require photomasks to produce lithographic images. After results of this market research are obtained and analyzed and specifications are developed for a laser lithography system that can meet NIST's minimum requirements, NIST may conduct a competitive procurement and subsequently award a Contract. NIST has a need for a laser pattern generator that would meet the following requirements: 1. RESOLUTION: A minimum structure size of 0.7m with a critical dimension (CD) uniformity of <100nm and feature roughness <100nm. 2. WRITE SPEED: A minimum write speed of 100 mm2/min (and still capable of writing features down to 0.7m). Systems with multiple speed/resolution modes are desired. 3. SUBSTRATE CAPABILITY: System should be capable of handling substrates from 75mm wafers up to and including 200mm wafers and up to 9"x 9"square substrates. 4. ALIGNMENT: System should include a camera for alignment with an accuracy of <100nm on pattern substrates. 5. DATA FORMAT: System should be capable of accepting or converting data types GDSII or DXF. 6. SOFTWARE: System operating software shall facilitate ease of instrument use since installed in a multi-user facility. 7. POSSIBLE TRADE-IN: NanoFab's current laser lithography system. The current model is a DWL 66FS manufactured by Heidelberg Instruments. 8. OPTIONS: Please provide additional options and upgrades that may be associated with the laser pattern generator. NIST is seeking responses from all responsible sources, including large, foreign, and small businesses. Small businesses are defined under the associated NAICS code for this effort, 334516, as those domestic sources having 500 employees or less. Please include your company's size classification and socio-economic status in any response to this notice. Vendors are requested to email a detailed report/product literature to describe the capabilities of their laser pattern generator to judy.pace@nist.gov no later than the response date for this sources sought notice. The literature should include product specifications that can be met and any other information relevant to meeting this requirement. Also, the following information is requested to be provided as part of the response to this sources sought notice: 1. Name of the company that manufactures the system components for which specifications are provided. 2. Name of company(ies) that are authorized to sell the system components, their addresses, and a point of contact for the company (name, phone number, fax number and email address). 3. Indication of number of days, after receipt of order that is typical for delivery of such systems. 4. Indication of whether each instrument for which specifications are sent to judy.pace@nist.gov are currently on one or more GSA Federal Supply Schedule contracts and, if so, the GSA FSS contract number(s). 5. Any other relevant information that is not listed above which the Government should consider in developing its minimum specifications and finalizing its market research.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/AMD-12-SS18/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN02678006-W 20120219/120217234244-ef471c4c4d931204b8e8bd6d9f18ad84 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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