Loren Data's SAM Daily™

FBO DAILY ISSUE OF JUNE 13, 2012 FBO #3854
MODIFICATION

66 -- UV PHOTOSTABILIZER SYSTEM

Notice Date

6/11/2012
 

Notice Type

Modification/Amendment
 

NAICS

333295 — Semiconductor Machinery Manufacturing
 

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640
 

ZIP Code

20899-1640
 

Solicitation Number

SB1341-12-RQ-0305
 

Archive Date

7/4/2012
 

Point of Contact

Lynda M Roark, Phone: 3019753725, Patrick K Staines, Phone: (301)975-6335
 

E-Mail Address

Lynda.Roark@nist.gov, patrick.staines@nist.gov
(Lynda.Roark@nist.gov, patrick.staines@nist.gov)
 

Small Business Set-Aside

Total Small Business
 

Description

The purpose of this amendment is to answer questions: Question 1: Specification 2, Item 2, states "Must include adjustable heated vacuum sample stage with the following minimum capability", V: Proximity bake or equivalent. Please clarify the requirement for Vacuum Sample Stage and Proximity bake or equivalent. Answer 1: Vacuum Sample Stage: the heating sample stage must have vacuum capability to stabilize the wafer position during the bake. Proximity bake is a photoresist baking process with nitrogen purging below the wafer so the wafer is not actually in contact with the hotplate surface. Alternative ways to avoid the direct contact and maintain the thermal stability shall be considered. Question 2: Item IV in specification 2, programmable temperature controller, Does that mean one can program the desired temperature or the ramp (up down) or both? Also, please clarify "must have curing time" under item IV. Does this refer to illumination, heating, or both? Answer 2: Programmable Temperature Controller means one can program the desired temperature. Curing time is applied to both. All other terms remain unchanged.
 

Web Link

FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-12-RQ-0305/listing.html)
 

Place of Performance

Address: 100 BUREAU DRIVE, GAITHERSBURG, Maryland, 20899, United States

Zip Code: 20899
 

Record

SN02772361-W 20120613/120611235430-2656aa3cba9a2ae06019d5d949ac70cc (fbodaily.com)
 

Source

FedBizOpps Link to This Notice
(may not be valid after Archive Date)

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