SOURCES SOUGHT
66 -- Photolithography Stepper
- Notice Date
- 6/28/2012
- Notice Type
- Sources Sought
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, ASC - Aeronautical Systems Center, 2275 D Street, Wright-Patterson AFB, Ohio, 45433-7218
- ZIP Code
- 45433-7218
- Solicitation Number
- F4FBBL2163A003(ss)
- Archive Date
- 7/25/2012
- Point of Contact
- Matthew J. Strange, Phone: 9372570997
- E-Mail Address
-
matthew.strange@wpafb.af.mil
(matthew.strange@wpafb.af.mil)
- Small Business Set-Aside
- N/A
- Description
- SOURCES SOUGHT SYNOPSIS (Not a Notice of Solicitation) The United States Air Force, ASC/Operational Contracting Division, Wright-Patterson AFB, Ohio is seeking potential sources that are capable of providing a refurbished Photolithography Stepper. This stepper must be a GCA Autostep 200 Series. Contractors responding should specify that their product meets the specifications provided below and provide detailed product information to show clear technical compliance. Additionally, sales history, including recent commercial companies sold to should be included to determine commerciality. The required specifications for the refurbished Photolithography Stepper: Stepper Must Have A: 1. Wavelength of I-line (365nm) 2. Magnification of 1:5X 3. Mask Size of 5" 4. Wafer Size of <=200mm 5. Resolution of 0.65µm equal line/space 6. Field Size of >= 14mm x 14mm 7. Tropel 2145i 5:1 I-Line Reduction Lens 8. Global Registration of +/-0.25µm 9. Local Die Registration using Micro Dark Field Alignment System (µDFAS) of +/-0.15µm 10. INSITU probe for measure and correct lens reduction, rotation and focus 11. Stage Precision of 0.15µm Total Indicator Runnout (TIR) 12. Depth of focus = 1.25µm 13. Rotation accuracy of +/- 0.15µm from zero error 14. Illumination Uniformity of +/- 2.5% 15. Wafer Leveling Repeatability of +/- 20ppm 16. Reticle aligner Accuracy of +/- 0.10µm 17. RMS reliability equal to 100 Reticle and Aperture cycle with zero errors 18. Aperture Blade Repeatability of +/- 0.25mm 19. Aperture Blade Skew of +/- 0.25mm 20. Leveling capability for any size and shape from 5mm to 150mm pieces and wafers. With addition requirements to include: 21. Stepper configured with a wafer chuck system that can accommodate pieces as small as 5mm and wafers as large as 100mm with thicknesses from 350µm to 550µm. 22. Upgraded High Definition (1080P) CCD Global Alignment System. 23. An uninterruptible power supply system is required to provide clean, conditioned power to the stepper as well as keeping the stepper powered up during minimal power outages and power bumps. 24. The UPS needs to be integrated into the system by the remanufacturer. 25. Personal Computer (PC) upgrade with a USB interface for software backups and potential remote access. 26. The computer needs to have USB capability for file transfer and the operating system is required to be Windows 98SE and support up to a 120GB hard drive. 27. VT340 monitor upgrade. Replace with a VGA capable emulation. 28. Environmental chamber to provide precise environmental control to ensure a class 10 clean environment when installed in a class 100 cleanroom and also maintain temperature control within +/- 0.1°C when cleanroom temperature is within +/- 2°F of chamber set point. 29. Documentation and system manuals for maintenance and operation. 30. The system (including all support equipment racks) must fit in an area of 160"W x 120"D. 31. Stepper must be fully factory qualified prior to shipment to AFRL/RYDD for installation. 32. All factory measured and accepted parameters must be duplicated at the AFRL/RYDD fabrication facility prior to acceptance of system. 33. RYDD will supply a fork lift to remove all crates from truck to ground level. 34. Contractor is responsible for all transportation/installation of the system (from factory to final destination at Wright-Patterson AFB. 35. Stepper system must fit through doorways with following dimensions: 87H x 70 W 36. Contractor responsible for supplying and customer responsible for installation of vibration dampened support jacks from concrete floor to raised floor (18.25"). 37. Contractor responsible for supplying and customer responsible for installation of environmental chamber prior to the delivery of stepper. 38. One year warranty from the acceptance date: to include all parts (exclusive of consumables) labor and travel to WP and unlimited phone support and consultation. 39. At least (2) two periodic maintenance (PM) visits at 4 month intervals and (1) one final PM at the end of the warranty period (to evaluate the stepper and perform required maintenance). All PMs will include travel and labor. 40. System must be ready for customer factory acceptance less than 8 months after contract award. 41. System will be installed and ready for service six weeks after customer factory acceptance. 42. (1) One week operational and maintenance training after acceptance at Wright-Patterson AFB. 43. All shipping and insurance to WPAFB. All interested contractors shall submit a response demonstrating their capabilities to produce the requested equipment to the Primary Point of Contact listed below. As stipulated in FAR 15.201, responses to this notice are not considered offers and cannot be accepted by the Government to form a binding contract. No solicitation exists; therefore, do not request a copy of the solicitation. The decision to solicit for a contract shall be solely within the Government's discretion. Contractors responding should indicate whether they are, or are not, a small business, a socially and economically disadvantaged business, or a woman owned business. The general definition of a small business is one that is independently owned and operated, is not dominant in the field of operation in which it is proposing on Air Force contracts and with its affiliates; and the number of employees does not exceed 500. NAICS Code to be used for this acquisition is 333295. The Government reserves the right to consider a small business set-aside based upon responses hereto for any subsequent acquisition. Respondents are further requested to indicate their status as a Foreign-owned/Foreign-controlled contractor and any contemplated use of foreign national employees on this effort. Any information submitted by respondents to this sources sought synopsis is voluntary. This sources sought notice is not to be construed as a commitment by the Government, nor will the Government reimburse any costs associated with the submission of information in response to this notice. Respondents will not individually be notified of the results of any government assessments. The Government's evaluation of the capability statements received will factor into whether any forthcoming solicitation will be conducted as a full and open competition or as a set-aside for small businesses, or any particular small business designation (e.g. SDVOSB, HUBZone, 8(a), SDB, WOSB, VOSB, etc.). CAPABILITIES PACKAGE: All interested contractors shall submit a capabilities package that explicitly demonstrates company capabilities-indicating examples of commercial sales-and product specifications related to this effort. Responses may be submitted electronically to the following e-mail address: matthew.strange@wpafb.af.mil in a Microsoft Word compatible format or mailed to ASC/PKOAA POC: Matthew Strange, 1940 Allbrook Dr. Ste 3 Rm 109, Wright-Patterson AFB, OH 45433-5309 to be received no later than 2:00 p.m. Eastern Standard Time, 10 July, 2012. Direct all questions concerning this acquisition to Matthew Strange at matthew.strange@wpafb.af.mil.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/USAF/AFMC/ASC/F4FBBL2163A003(ss)/listing.html)
- Place of Performance
- Address: 2241 Avionics Circle, WPAFB, Ohio, 45433, United States
- Zip Code: 45433
- Zip Code: 45433
- Record
- SN02789086-W 20120630/120628235334-bf4605e5760b0e09264e1c6fc061a92e (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
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