SOLICITATION NOTICE
66 -- Rapid Thermal Processor
- Notice Date
- 7/16/2012
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- Department of the Air Force, Air Force Materiel Command, AFNWC/PKO - Kirtland (Operational Contracting Division), AFNWC/PKO Operational Contracting Division, 2000 Wyoming Blvd SE, Bldg 20604, Room B-9, Kirtland AFB, New Mexico, 87117-5606, United States
- ZIP Code
- 87117-5606
- Solicitation Number
- F2KBAD2151A001
- Archive Date
- 8/2/2012
- Point of Contact
- Bernadette N. Kerkhoff, Phone: 5058464670, Carl Landreneau, Phone: 505-846-4877
- E-Mail Address
-
bernadette.kerkhoff@kirtland.af.mil, carl.landreneau@kirtland.af.mil
(bernadette.kerkhoff@kirtland.af.mil, carl.landreneau@kirtland.af.mil)
- Small Business Set-Aside
- Total Small Business
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) Solicitation F2KBAD2151A001 is issued as a request for quotation (RFQ). (iii) This solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-58, Effective 18 May 2012 (iv) This procurement is being issued as 100% Small Business Set-a-side under NAICS code 334413, Industrial Process Furnaces and Over Manufacturing, size standard 500 employees. The Government intends to award 1 contract line item number for CLIN 0001 Rapid Thermal Processor QUANTITY: 1 Each FOB: DESTINATION. Inspection and Acceptance: DESTINATION. The following provisions and clauses apply to this procurement: 52.212-2 EVALUATION--COMMERCIAL ITEMS (JAN 1999) (a) The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforming to the solicitation will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: In accordance with the FAR 13.106-1(a)(2) offerors are notified that award will be made on the following basis: (i) Technical capability (ii) Price In accordance with the FAR 13.106-1(a)(2) offerors are notified that award will be made on the basis of price. Offeror will be evaluated in accordance with FAR 13.106-2. FAR 52.212-3, Offeror Representations and Certification-Commercial Items (all offerors shall include a completed copy of this provision with their proposal); An offeror shall complete only paragraphs (b) of this provision if the offeror has completed the annual representations and certificates electronically at http://orca.bpn.gov. If an offeror has not completed the annual representations and certifications electronically at the ORCA website, the offeror shall complete only paragraphs (c) through (m) of this provision; FAR 52.212-4, Contract Terms and Conditions-Commercial Items; FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders-Commercial Items. [in paragraphs (b) and (c) the following clauses apply 52.219-6, 52.219-28; 52.222-3; 52.219-8; 52.219-14; 52.222-21; 52.222-26; 52-222-36; 52-222-37; 52.225-13; 52.232-33; 52.222-41; 52.222-42, Employee Class: 23160, Electrician, Maintenance; Monetary Wage: WG-10; 52.222-44; Addendum to FAR 52.212-5: FAR 52.252-2, Clauses and provisions may be accessed in full text at http://farsite.hill.af.mil/; 52.237-2 Protection of Government Buildings, Equipment and Vegetation; DFAR 252.212-7001 Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items. [in paragraph(s) (a) and (b) the following clause(s) apply 252.225-7001]; 252.225-7002, 252.204-7004 Alt A; 252.232-7003; and 252.247-7023 Alt III. AFFARS 5352.201-9101 OMBUDSMAN (APR 2010) (a) An ombudsman has been appointed to hear and facilitate the resolution of concerns from offerors, potential offerors, and others for this acquisition. When requested, the ombudsman will maintain strict confidentiality as to the source of the concern. The existence of the ombudsman does not affect the authority of the program manager, contracting officer, or source selection official. Further, the ombudsman does not participate in the evaluation of proposals, the source selection process, or the adjudication of protests or formal contract disputes. The ombudsman may refer the party to another official who can resolve the concern. (b) Before consulting with an ombudsman, interested parties must first address their concerns, issues, disagreements, and/or recommendations to the contracting officer for resolution. Consulting an ombudsman does not alter or postpone the timelines for any other processes (e.g., agency level bid protests, GAO bid protests, requests for debriefings, employee-employer actions, contests of OMB Circular A-76 competition performance decisions). (c) If resolution cannot be made by the contracting officer, concerned parties may contact the Center/MAJCOM or AFISRA ombudsmen, AFNWC Ombudsmen: Ms. Jeannine Kinder AFNWC/PK E-Mail: jeannine.kinder@kirtland.af.mil Phone: (505) 846-1924 Concerns, issues, disagreements, and recommendations that cannot be resolved at the MAJCOM/DRU or ARISRA level, may be brought by the concerned party for further consideration to the Air Force ombudsman, Associate Deputy Assistant Secretary (ADAS) (Contracting), SAF/AQC, 1060 Air Force Pentagon, Washington DC 20330-1060, phone number (703) 588-7004, facsimile number (703) 588-1067. (d) The ombudsman has no authority to render a decision that binds the agency. (e) Do not contact the ombudsman to request copies of the solicitation, verify offer due date, or clarify technical requirements. Such inquiries shall be directed to the Contracting Officer. All payments are to be paid via the Internet through the Wide Area Work Flow (WAWF) system. WAWF may be accessed at https://wawf.eb.mil. WAWF training may be accessed online at http://www.wawftraining.com. Payment information may be accessed using the DFAS website at https://www.dfas.mil. Your purchase order/contract number of invoice will be required to inquire status of your payment. Proposals may be E-mailed (preferred) to bernadette.kerkhoff@kirtland.af.mil or mailed to AFNWC/PKOA, ATTN: Bernadette N. Kerkhoff, 2000 Wyoming Blvd SE, Bldg. 20604, Room B-18, Kirtland AFB., NM 87117, or faxed to (505) 846-8925 ATTN: Bernadette N. Kerkhoff. ADDITIONAL INFORMATION: Be advised that all interested parties must be registered in the Central Contractor Registration (CCR) Database in order to receive an award. If you are not registered you may request an application at (888) 227-2423 or through the CCR website at http://www.ccr.gov. Specifications A Rapid Thermal Processor (RTP) system is required RDLAS. This RTP system will allow researchers to anneal metals at 450⁰C to semiconductor substrate which will enhance electrical conductivity through the metal/substrate interface and the also allow researchers to heat the edges of the crystal to a temperature of 1000⁰C which repairs crystal damage caused by the Ion Implantation process. This RTP process allows the devices to operate efficiently and be packaged into usable devices. This RTP system is one of about a dozen tools that are required to complete the cleanroom device processing facility which is being assembled at RDLAS. RTP systems are commercially available products, and the user typically specifies several add-on items, such as the required number of mass flow controllers (MFC's), substrate temperature monitoring capability, substrate holding and heating stage called a susceptor, vacuum system and chiller system needed to complete the system. An example of a commercially available product that will meet AFRL needs is the ALLwin21 Corp. system, model AW 610. Any RTP system that meets the specifications described will be acceptable. RTP system main unit SPECIFICATIONS (ALLwin21 corp. #AW610 or equivalent): • Signal wafer process • Gold plated Aluminum chamber with water cooled jacket • 6 inch isolated Quartz tube and tray for 4 to 6 inch diameter wafers • Top and bottom heating • Temperature range 100-1250⁰C with +/-1⁰C accuracy. • Extended Range Pyrometer (ERP) and tube for temperatures from 450C to 1250C or equivalent • Neslab (or equivalent) water chiller for ERP Pyrometer • Thermocouple sensor for room temp to 450C • Gas box with 2 @ 10 SLM Mass flow controllers, shut off valves set up for Nitrogen and 3.8% Hydrogen in Nitrogen balance. • 3 inch graphite susceptor with SiC coating • User programmable with multiple settings • 1C to 150C temperature ramp up • 1C to -150C ramp down • Data logger software with user friendly graphical display and CPU control unit • Safety interlocks • Emergency shut off (EMO) • UL Certification • Operations manual • System should be clean-room ready CRATING AND SHIPPING: • System should be professionally crated to ensure safe transit INSTALLATION: • System installed by factory trained technician/engineer on premises at KAFB, NM • System installed per OEM factor specification • System operational integrity checked and verified in presence of user prior to acceptance TRAINING: • On-site training of three (3) AFRL/RDLAS employees by factory trained technician/engineer WARRANTY: • Minimum of 12 months parts and labor at installation site KAFB, NM • RTP system and all subsystems should be free from any defects in materials, workmanship and system operations for 12 months from acceptance • During the warranty period, all replacement parts must meet all OEM specifications
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/USAF/AFMC/377CONSKOC/F2KBAD2151A001/listing.html)
- Place of Performance
- Address: Kirtland AFB, Albuqueqrue, New Mexico, 87117, United States
- Zip Code: 87117
- Zip Code: 87117
- Record
- SN02804330-W 20120718/120716235534-d1aced3f87fdb86dedde33f12fce21d3 (fbodaily.com)
- Source
-
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