SOLICITATION NOTICE
66 -- Contact Mask and Bond Alignment Systems
- Notice Date
- 8/17/2012
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 333295
— Semiconductor Machinery Manufacturing
- Contracting Office
- ACC-APG - Adelphi, ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX12R0042
- Response Due
- 9/20/2012
- Archive Date
- 11/19/2012
- Point of Contact
- Tammy L. Wright, 301-394-0045
- E-Mail Address
-
ACC-APG - Adelphi
(tammy.l.wright1@us.army.mil)
- Small Business Set-Aside
- N/A
- Description
- This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-12-R-0042. This acquisition is issued as a Request for Quotation. (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-60 dated 26 July 2012. (iv) This acquisition is Full and Open Competition. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 Contact Mask and Bond Alignment System (vi) Description of requirements: C.1 Contact Mask and Bond Alignment System Requirement -The Contractor shall deliver and install at the Army Research Laboratory, Adelphi, MD a quantity one (1) Contact Mask and Bond Alignment System that meets all requirements as stated below: C.1.1 The Contractor shall ensure the Contact Mask and Bond Alignment System processes substrates that meet the specifications listed in Table 1 Table 1: Substrates to be processed Wafer Diameter (mm)Thickness Range (um)ConfigurationMaterials 100mm200um-1000umSemiconductor Equipment and Materials International (SEMI) standard flatsSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide 150mm300um-1000umSEMI standard flats or notchSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide 200mm400um-1000umSEMI standard flats or notchSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide C.1.2 The Contractor shall ensure the Contact Mask and Bond Alignment System meets the accuracy and resolution specifications in Table 2 for the substrates listed in Table 1. Table 2: Contact Mask and Bond Alignment System alignment accuracy and resolution TypeLocationSpec Alignment Accuracy (proximity)Top side AlignmentPlus or minus 0.5 microns (um) Alignment Accuracy (hard contact)Top side AlignmentPlus or minus 0.5 microns (um) Alignment Accuracy (proximity)Bottom side AlignmentPlus or minus 1.0 microns (um) Alignment Accuracy (Large Gap)Top side alignmentPlus or minus 1.25 microns (um) ExposureResolution in vacuum contactLess than 0.8 um ExposureResolution in proximity contactLess than 2.0 um C.1.3 The Contractor shall ensure that the Contact Mask and Bond Alignment System consists of a fully functional front side and backside alignment systems with the following capabilities and components: -Wafer sizes up to 200mm -Manual alignment stage with precision micrometers compatible with the alignment specifications in Table 2 -High resolution optics in the Near Ultra Violet (NUV) range (wavelength 280-450 nanometers) with lamp house for a 1000 Watt Mercury lamp -A topside microscope and a bottomside microscope with two (2) high (greater than one megapixel) resolution charge coupled device (CCD) cameras and 18" diagonal viewing screen with Wide Extended Graphics Array (WXGA) resolution display -Mask holders of sizes 5 inch by 5 inch, 7 inch by 7 inch, and 9 inch by 9 inch -Integrated vibration isolation table -Computer controlled operations of the exposure profiles, wafer gap and alignment modes. Factory installation of the pressure and vacuum plumbing, as well as input/output connections required for the addition of aftermarket nanoimprint lithography capabilities C.1.4 The Contractor shall ensure the Contact Mask and Bond Alignment System accommodates wafer thickness from 0.1 to 5 millimeters for topside configuration, quick (less than a minute) change of mask and chuck, and separation distance between mask and substrate of 0 to 300 microns adjustable via user input through integrated software and computer controlled operating environment. C.1.5 The Contractor shall ensure the Contact Mask and Bond Alignment System fully operates in the following exposure modes: hard, soft, vacuum contact, and proximity. C.1.6 The Contractor shall ensure the Contact Mask and Bond Alignment System is configured for commercial bond alignment fixtures to include anodic bonding (0-2kV, 0-50mA), thermo-compression bonding (0-60kN, 25-500 degrees Celsius, 1e-3-1e3mbar) and fusion pre-bonding for substrates of the sizes and materials listed in table one. C.1.7 The Contractor shall ensure the Contact Mask and Bond Alignment System is new (unused and not refurbished). C.1.8 The Contractor shall ensure the Contact Mask and Bond Alignment System meets all industry standard requirements for safety as regulated by the Occupational Safety and Health Administration (OSHA) and National Electrical Safety Code including the use of Emergency Off (EMO) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. C.1.12 The Contractor shall ensure that the Contact Mask and Bond Alignment System is Nationally Recognized Testing Laboratory (NRTL) certified. C.1.13 The Contractor shall ensure that the Contact Mask and Bond Alignment System: -Accommodates the loading of the substrate sizes listed in table one and piece parts derived from them as small as 10mm x 10mm squares -Has an alignment stage with precision micrometers supporting alignment in X, Y and Theta with micrometer spindles, with a travel of plus or minus 5 millimeters in X and Y, and plus or minus 5 degrees in theta. -Has a motorized Z-axis -Has an automatic wedge compensation system designed for optimized print gap control C.1.14 The Contractor shall ensure that vacuum contact wafer chucks for the Contact Mask and Bond Alignment System are included for 100mm, 150mm, and 200 mm wafers and are configured as follows: -Seal for vacuum contact -Pre-alignment aid for manual loading -Hard coated and lapped surface finish for wafer contact area -Windows to enable bottom side alignment -Function with proximity, soft, hard and vacuum contact exposure -Function with vacuum contact with substrates up to 1.5 millimeters in thickness C.1.15 The Contractor shall ensure that mask holders are included for 5 inch by 5 inch, 7 inch by 7 inch and 9 inch by 9 inch masks with loading frame and have the following: -Round opening for exposure of wafers -Hard coated and lapped surface finish for mask contact area -Bottom loading system with automated vacuum transfer C.1.16 The Contractor shall ensure that the Contact Mask and Bond Alignment System contains a lamp house for 1000 Watt Mercury lamps and includes: -Optical sets in NUV range (280-450 nanometers) -A light integrator -Optimized parallel light with exposure uniformities of plus or minus 3 percent for 100mm and 150mm wafers and plus or minus 4 percent for 200mm wafers. -Exposure intensity to meter to support the constant intensity exposure mode. C.1.17 The Contractor shall ensure that the Contact Mask and Bond Alignment System includes a topside microscope with the following: -Motorized split field microscopes for alignment in visible light with high (in excess of one megapixel) resolution Charge Coupled Device cameras for top and bottom side -Travel range of one (1) top side microscope of 30 to 200 millimeters in X, and 115 millimeters in Y. -Fine topside alignment using two (2) 20 times objectives or 4x digital zoom. -Two (2) 10 times objectives -Two (2) additional 10 times objectives configured for the alignment of single chips and wafer flat C.1.18 The Contractor shall ensure that the Contact Mask and Bond Alignment System includes a bottom side microscope with the following: -Motorized split field microscopes for alignment in visible light with high (in excess of one megapixel) resolution Charge Coupled Device cameras -Bottom side alignment via cross hair -Travel range of one bottom side microscope of 100 millimeters in X, and 25 millimeters in Y -Fine backside alignment using two (2) 20 times objectives or 4x digital zoom. -Two (2) 10 times objectives C.1.19 The Contractor shall ensure that the Contact Mask and Bond Alignment System has a computer controlled software environment that meets the following: -Microsoft-Windows based process software for recipes, processing and diagnostics -Automated recording of process parameters -Storage of files and presets on minimum 100GB hard disk -Password protected access levels for operator, engineer, and maintenance -The software does not contain any features that disables the functionality -The Contractor shall provide all new software releases, upgrades and patches for the Contact Mask and Bond Alignment System under this contract for three (3) years after the contract acceptance of the tool at no cost -C.1.20 The Contractor shall provide a spare parts kit consisting of items subject to rapid wear if operational 24/7 to include valves, "O" rings and relays. The Contractor shall provide a complete list of all wearable items. C.1.21 Reliability Specifications and Definitions: Standard wafers - Semiconductor Equipment and Materials International (SEMI) specification format in terms of geometry, with low to moderate wafer bow (<30um), within the contracted materials and thickness ranges listed in table one, minimal backside patterning, and no through wafer vias Failure: Equipment has a problem, requires repair. Repair: Modification to hardware or software necessary for equipment to return to specified process behavior. High Failure: Failure compromising personnel safety, equipment damage or product damage. Low Failure: Failure not comprising personal safety, equipment damage or product damage. Assist: Unplanned interruption, or deviation from specified process behavior, recoverable by operator reset without requiring repair. Post reset there is no variation from specified process behavior. Uptime: Percentage of twelve (12) hour shift time that the equipment is able to process as specified. For the purposes of the test, performance means are calculated over the test interval. C.1.21.1 The contractor shall ensure the Contact Mask and Bond Alignment System meets the following Metrics: -Mean Time Before High Failure (MTBHF) No significant process variation from predetermined process set, processing standard, wafers. Greater than ninety (90) days (i.e. less than one (1) qualifying event per ninety (90) days). -Mean Time Before Low Failure (MTBLF) No significant process variation from predetermined process set, processing standard, wafers. Greater than thirty (30) days (i.e. less than three (3) qualifying event per ninety (90) days). -Mean Time Before Assist (MTBA) Greater than five (5) days (i.e. less than eighteen (18) qualifying events per ninety (90) days). -Mean Time to Repair (MTTR) Time tool is not available for processing. Less than 72 hours -Uptime Higher than 95% C.1.22 Pre-installation Acceptance Tests The Contractor shall demonstrate to the Technical Point of Contact(TPOC) before shipment of the Contact Mask and Bond Alignment System that the contact and bond aligner in the System is fully functional at the Contractor's facility using the following Government created acceptance tests. The Contractor shall propose to the TPOC a date and time for acceptance test attendance at least one (1) month prior to proposed date. The TPOC will accept or deny the proposed date and time within three (3) days. C.1.22.1 Demonstration that the contact and bond aligner functionality of the Contact Mask and Bond Alignment System meets base specifications listed in Table two in C.1.2 for substrates listed in Table 1 in C.1.1 through: substrates handled, programmability, exposure modes supported, exposure uniformity, repeatability, alignment modes, and alignment tolerances. C.1.22.2 Demonstration that the contact and bond aligner functionality of the Contact Mask and Bond Alignment System is operationally functional through confirmation of alignment and exposure of 100mm, 150mm, and 200mm substrates in all alignment modes and exposure modes. C.1.22.3 Demonstration that the contact and bond aligner functionality of the Contact Mask and Bond Alignment System is operationally functional as a bond aligner through aligning of 100mm, 150mm, and 200mm diameter substrates loaded into bonder compatible fixtures. C.2 Pre-installation Acceptance Tests Report The Contractor shall submit a pre-installation acceptance tests report to the TPOC outlining the results of the acceptance tests in C.1.20.1 within eight (8) months of contract award. The TPOC will approve the acceptance test report within one (1) week of receiving the results. The Contractor shall ship the Contact Mask and Bond Alignment System only after the TPOC has approved the test results report. C.3 Delivery and Installation The Contractor shall deliver and install the Contact Mask and Bond Alignment System at the ARL, 2800 Powder Mill Road, Bldg 207 Rm 3B-53 within four (4) weeks of receiving TPOC approval of the acceptance test report. The Contractor shall propose a delivery date to the TPOC at least three (3) weeks prior to proposed date. The TPOC will approve or deny the proposed date and time within three (3) days. C.3.1 Post-installation Acceptance Tests The Contractor shall demonstrate to the TPOC that the Contact Mask and Bond Alignment System is fully functional after the system has been installed in Bldg 207 Rm 3B-53 and meets the specifications in Table One and Table Two using the following Government created acceptance tests: C.3.1.1 Demonstration that the Contact Mask and Bond Alignment System meets base specifications through confirmation of substrates handled, programmability (specifications listed in C.1.19), exposure modes supported, exposure uniformity, repeatability, alignment modes, and alignment tolerances. C.3.1.2 Demonstration that the Contact Mask and Bond Alignment System is operationally functional, which through confirmation of alignment and exposure of 100mm, 150mm, and 200mm substrates in all alignment modes and exposure modes. C.4 Post-installation Acceptance Tests Report The Contractor shall submit a post-installation acceptance test report to the TPOC outlining the results of the acceptance tests in C.3.1 within two (2) weeks of installation. The TPOC will approve the acceptance test report within one (1) week of receiving the results. C.5 Operator and Maintenance Training The Contractor shall conduct operator and maintenance training following the installation of the Contact Mask and Bond Alignment System at ARL. For training purposes, the Contractor shall travel to ARL in Adelphi, Maryland, to provide two (2) days, a total of 16 hours, of operator and maintenance training for up to eight (8) participants. The Contractor shall ensure the training takes place within three (3) weeks of delivery date and time approved by TPOC in C.3. C.6 Troubleshooting and Warranty C.6.1 Troubleshooting The Contractor shall provide access to a technical support person to answer questions regarding tool operation, hardware troubleshooting, and basic imaging via telephone or email during normal business hours 0900-1700 for the time zone of the Contractor's main base of operation for the duration of ownership. The Contractor shall ensure the technical support person responds to voicemails and emails within two (2) business days. C.6.2 Warranty The Contractor shall provide a full warranty on the Contact Mask and Bond Alignment System for one (1) year after approval of the post-installation test report. The Contractor shall ensure the warranty includes: -Installation and replacement of all parts (excluding consumable parts and materials) at no cost -All repairs or modifications if the Contact Mask and Bond Alignment System is no longer functional according to the acceptance test specifications defined in C.1.21 at no cost -All labor and transportation costs to and from ARL for repairs and modification if the Contact Mask and Bond Alignment System is no longer functional according to the acceptance test modifications defined in C.1.21 -A response time of 48 hours from the time the Government calls or emails in a request for service to diagnose and propose a plan to repair the Contact Mask and Bond Alignment System, and commence repair activities within 96 hours from the time of request.Should the equipment fail to meet the specified reliability metrics during the first ninety (90) days of operation (the test period), the Contractor may elect to repair the system and start a new ninety (90) day test period. Should the system fail the reliability test three (3) times and not remain functional for a consecutive ninety (90) day period, the purchaser has the option to return the equipment for a full refund. C.7 Deliverables C.7.1 Pre-installation Acceptance Tests Report - The Contractor shall provide the TPOC with a Pre-installation Acceptance Tests Report prior to shipment of the Contact Mask and Bond Alignment System within eight (8) months of contract award. The Contractor shall ensure the test report shows the test results for all required tests in C.1.21. The Contractor shall ensure the report is in electronic format. C.7.2 Post-installation Acceptance Tests Report - The Contractor shall provide the TPOC with a Post-installation Acceptance Tests Report after installation of the Contact Mask and Bond Alignment System within two (2) weeks of installation. The Contractor shall ensure the test report shows the test results for all required tests in C.3.1. The Contractor shall ensure the report is in electronic format. C.7.3 Contact Mask and Bond Alignment System - The Contractor shall deliver a Contact Mask and Bond Alignment System that meets all specifications in C.1 to the location listed in C.3. The Contractor shall pay all destination shipping, insurance, and customs fee required for the delivery of system. C.7.4 Contact Mask and Bond Alignment System Schematic Drawings/Operation Manual - The Contractor shall provide the TPOC, upon delivery, with a electronic copy in Portable Document Format (.pdf) of the schematic drawings, including electrical diagrams for the Contact Mask and Bond Alignment System, along with a electronic copy of the Operation Manual for the Contact Mask and Bond Alignment System written in English. C.7.5 Consumable Parts and Materials List - The Contractor shall provide the TPOC, upon delivery, a comprehensive list of all consumable items needed to maintain the operation of a 24/4 fully functional Contact Mask and Bond Alignment System, to include requires quantity, part number, manufacturer, and ordering information. (vii) Delivery is required by 12/01/2012. Delivery shall be made to the Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783. Acceptance shall be performed at the Army Research Laboratory, 2800 Powder Mill Road, Adelphi, MD 20783. The FOB point is destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: None (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include five (5) records of sales from the previous twelve (12) months of which at least three (3) must be for the tool model proposed, and all records must be for the same type of equipment. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Point of contact may be contacted to discuss satisfaction with Offerors product and support. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause: None (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-6, 25.204-10, 52.209-6, 52.209-9, 52.209-10, 52.219-4, 52-219-6, 52.219-8, 52.219-14, 52.219-28,, 52.222-19, 52.222-21, 52.222-26, 52.222-35, 52.222-37, 52.222-40, 52.223-18, 52.232-33, 52.232-36, 252.203-7000, 252.211-7003, 252.211-7003 Alt I, 252.225-7001, 252.225-7012, 252.232-7003, 252.243-7002, 252.247-7023, 252.247-7023 ALT III. The full text of a clause may be accessed electronically at this/these address(es): http://farsite.hill.af.mil/ and https://www.acquisition.gov/Far/. (xiii) The following additional contract requirement(s) or terms and conditions apply: ACC-APG-ADL-B.5152.204-4409, ACC-APG-ADL-B.5152.204-4411, ACC-APG-ADL-B.5152.216-4407, ACC-APG-ADL-E.5152.246-4400, ACC-APG-ADL-G.5152.232-4418, ACC-APG-ADL-H.5152.205-4401, ACC-APG-ADL-H.5152.211-4401, ACC-APG-ADL-L.5152.203-40, ACC-APG-ADL-L.5152.215-41. Offerors who require a copy of the text of these clauses can contact Ms. Tammy Wright at tammy.l.wright1.civ@mail.mil. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as n/a. (xv) The following notes apply to this announcement: None (xvi) Offers are due on 20 September 2012 by 11:59 PM ET at tammy.l.wright1.civ@mail.mil (xvii) For information regarding this solicitation, please contact Tammy Wright, 301-394-0045, tammy.l.wright1.civ@mail.mil
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/a785aca67232872d397a3d7899ad2b4b)
- Place of Performance
- Address: ACC-APG - Adelphi ATTN: AMSRD-ACC, 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN02844944-W 20120819/120818000058-a785aca67232872d397a3d7899ad2b4b (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |