SOLICITATION NOTICE
66 -- Laser Lithography System
- Notice Date
- 8/28/2012
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- ACC-APG - Adelphi, ATTN: AMSRD-ACC, 2800 Powder Mill Road, Adelphi, MD 20783-1197
- ZIP Code
- 20783-1197
- Solicitation Number
- W911QX-12-R-0049
- Response Due
- 9/27/2012
- Archive Date
- 11/26/2012
- Point of Contact
- Phillip J. Amador, 575-678-3523
- E-Mail Address
-
ACC-APG - Adelphi
(phillip.j.amador.civ@mail.mil)
- Small Business Set-Aside
- N/A
- Description
- (i) This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. (ii) The solicitation number is W911QX-12-R-0049. This acquisition is issued as an Request for Quote (RFQ). (iii) The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 2005-60. (iv) The associated NAICS code is 334516. The small business size standard is 500. (v) The following is a list of contract line item number(s) and items, quantities and units of measure, (including option(s), if applicable): CLIN 0001 - LASER LITHOGRAPHY SYSTEM, Quantity: One (1) Lot (vi) Description of requirements: Quantity of one (1) new (unused and not refurbished) Laser Mask Writer and Lithography System (hereafter referred to as Laser Writer System) capable of processing the substrates listed in Table 1 and in accordance with the corresponding specifications. Table 1: Substrates to be processed Wafer Diameter millimeter (mm) Thickness Range micrometer (um)ConfigurationMaterials (Substrates) 100mmZero (0) um-6000umSemiconductor Equipment and Materials International (SEMI) standard flatsSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide 150mmZero (0) um-6000umSEMI standard flats or notchSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide 200mm Zero (0) um-6000umSEMI standard flats or notchSilicon, Glass, Gallium Arsenide, Sapphire, Silicon Carbide Up to nine (9) inch (in) X nine (9) in.Zero (0) um-6000umNASodalime glass, Quartz 1. Fully functional Laser Pattern Generator and Direct Writing Platform with the following components and capabilities: Stage system with two (2) Linear Motors and Interferometric Position Control with the following: One (1) of the two (2) Linear Motor shall be in the X-direction and the other Linear Motor shall be in the Y-direction; Substrate size between 5mm by 5mm and 9in. by 9in. of substrate material listed in Table 1.; Write Area of up to 200mm by 200mm; Substrate thickness of zero (0) mm to 6mm (includes thickness of attached wafers and mask plates); Position resolution of 10 nanometers (nm) 2. Environment chamber providing a stable environment for the system with: Adjustable Laminar airflow of 0.3 to 0.5 meters per second (m/s); Temperature Stability of +/- 0.1 Degrees Celsius (oC); Class 10 air quality 3. Base made of granite with four (4) air cushions for vibration isolation; Optical System with the necessary amount of highly reflective mirrors and at least two (2) acousto-optic modulators; Metrology system with one (1) macro camera and one (1) micro camera that have the ability to upgrade to a back side alignment; Includes all system control electronics necessary for interferometer, stage and autofocus system, a real time pixel generator, and image processing hardware. Spare parts kit consisting of items subject to relatively rapid wear if operational 24 hours a day / seven days a week (24/7). The Contractor shall provide a complete list of all wearable items. 4. Software requirements: System Control software and graphical user interface that is compatible with Microsoft Windows; Lifetime software licenses for all software supplied with the Laser Writer System that does not disable pending license verification; Conversion software compatible with Linux for Drawing Exchange Format (DXF), Crystallographic Information File (CIF), Graphic Database System II format (GDSII), and Gerber file formats; Compatible with GenISys LayoutBeamer software in future. 5. Installed with a 405nm, 100mW output power Diode laser allowing user to switch between Write Modes within two (2) to three (3) minute and Standard resists in both binary and gray scale mode. Has the following: Two (2) Write Modes, each with a separate set of specifications as follows: One (1) of the Write Modes shall meet the following: Minimum Feature Size of 0.6um; Address Grid that is less than 10nm; Write Speed of at least 13 millimeters squared (mm2) / minute; Edge roughness that is three (3)-sigma < 60nm; Critical Dimension Uniformity that is three (3)-sigma < 80nm ; Alignment Accuracy that is three (3)-sigma < 80 nm. The second of the two (2) Write Modes shall meet the following :Minimum Feature Size of 0.8 um; Address Grid less than 25nm; Write Speed at least 75mm2 / minute; Edge roughness that is three (3)-sigma < 100nm; Critical Dimension Uniformity that is three (3)-sigma < 120nm; Alignment Accuracy that is three (3)-sigma < 110 nm 6. Configured with Autofocus features that have the following: Supports the substrates and applications in Table 1; Autofocus resolution of 50 nm; Autofocus reaction time of 50 ms; Multi-layer exposure independent of surface topologies; Writes patterns up to the edge of the substrate; Writes on substrates as small as 5mm by 5mm 7. Equipped with a metrology system that has dual cameras to perform the following processes on the substrates listed in Table 1: Measure Line width, Edge roughness in x-and y-direction, and Position with respect to alignment marks or Template matching; Compensate offset, rotation, and scaling for an overlay exposure with four (4)-point alignment; Compensate for the skew of the substrate with global alignment and without the need of mechanical rotation of the substrate; Manage alignment and Metrology through scripts on the systems graphical user interface (GUI) to create reports from a series of measurements throughout a substrate. 8. Equipped with a Gray Scale Exposure Mode that can create three (3)-dimensional (3D) structures using a single exposure. The number of Gray Scale Intensity Levels shall be greater than or equal to 128. 9. Includes Data Preparation and Conversion capabilities configured with the following: Separate workstation for the data preparation and conversion that includes two (2) state of the art personal computers (PC) for system control based on Microsoft Windows and data conversion based on Linux; The Binary and Gray Scale Exposure Modes supporting the following formats: CIF, GDSII, Gerber, DXF, Bitmap (BMP), Standard Tesellation Language (STL), American Standard Code for Information Exchange (ASCII) in x,y and z co-ordinates; Minimum requirements for Conversion Software include the following:Binary operations between Layers (such as XOR (Exclusive Either One is True, but Not Both) ); Image reversal (positive/negative); Biasing; Image scaling; Image rotation; Step and Repeat / Array; Design preview that shows an actual representation of substrates prior to writing. 10. Meets all industry standard requirements for safety as regulated by the Occupational Safety and Health Administration (OSHA) and National Electrical Safety Code including the use of Emergency Off (EMO) panic buttons, shielding and interlocks for hazardous areas including high voltages and moving parts. 11. Meets the following Reliability Specifications: Mean Time Before High Failure (MTBHF): No significant process variation from predetermined process set, processing standard, wafers greater than 90 days (i.e. less than one (1) qualifying event per ninety (90) days). Mean Time Before Low Failure (MTBLF): No significant process variation from predetermined process set, processing standard, wafers. greater than thirty (30) days (i.e. less than three (3) qualifying event per ninety (90) days). Mean Time Before Assist (MTBA): Greater than five (5) days (i.e. less than eighteen (18) qualifying events per ninety (90) days). Mean Time to Repair (MTTR): Time tool is not available for processing less than seventy two (72) hours. Uptime: Higher than ninety five (95)%. Definitions for reliability specifications: Standard wafers: Semiconductor Equipment and Materials International (SEMI) specification format in terms of geometry, with low to moderate wafer bow (<30um), within the contracted materials and thickness ranges listed in table one, minimal backside patterning, and no through wafer vias. Failure: Equipment has a problem that requires repair. Repair: Modification to hardware or software necessary for equipment to return to specified process behavior. High Failure: Failure compromising personnel safety, equipment damage or product damage. Low Failure: Failure not comprising personal safety, equipment damage or product damage. Assist: Unplanned interruption, or deviation from specified process behavior, recoverable by operator reset without requiring repair. Post reset there is no variation from specified process behavior. Uptime: Percentage of twelve (12) hour shift time that the equipment is able to process as specified. For the purposes of the pre-installation acceptance test and the post-installation tests, performance means are calculated over the testing period intervals. 12. Pre-installation Acceptance Tests and Report: The Contractor shall demonstrate to the Government that the Laser Writer System is fully functional and meets the base specifications using the following Government created acceptance tests. The Contractor shall conduct the pre-installation acceptance tests at the Contractor's facility within six (6) months of contract award and provide a report with the results. The Contractor shall propose the pre-installation acceptance test date to the Government at least three (3) weeks prior to proposed date. The Government will approve or deny the proposed date and time within three (3) days. Demonstration that the Laser Writer System meets base specifications through confirmation of successful processing of substrates in Table 1. Demonstration that the Laser Writer System meets base specification through successfully writing patterns directly on wafers and mask plates. 13. Pre-installation Acceptance Tests Report: The Contractor shall submit a pre-installation acceptance test report to the Government outlining the results of the acceptance tests within two (2) weeks of testing. The Government will approve the acceptance test report within one (1) week of receiving the results. The Contractor shall provide the Government with the Pre-installation Acceptance Tests Report prior to shipment of the Laser Writer System within eight (8) months of contract award. The Contractor shall ensure the test report shows the test results for tests. The report to be in electronic format. 14. Delivery and Installation: Deliver and install the Laser Writer System at the Army Research Laboratory, (ARL) 2800 Powder Mill Road, Bldg 207 Room 3B-30., Adelphi, MD 20783-1138. The Contractor shall propose a delivery date to the Government at least three (3) weeks prior to proposed date. The Government will approve or deny the proposed date and time within three (3) days. 15. Post-installation Acceptance Tests and Report: The Contractor shall perform post-installation acceptance tests on the fully functional Laser Writer after the system has been installed in Bldg 207 Room 3B-30 of the ARL and meets the specifications using the following Government created acceptance tests. The Contractor shall conduct the post-installation tests at ARL within two (2) weeks of installation. Demonstration that the Laser Writer System meets base specifications as through confirmation of the successful handling of parts and substrates listed in Table 1. Demonstration that the Laser Writer System meets the base specifications for programmability as listed 16. Post-installation Acceptance Tests Report: The Contractor shall submit a post-installation acceptance test report to the Government outlining the results of the acceptance tests within two (2) weeks of installation. The Government will approve the acceptance test report within one (1) week of receiving the results. The Contractor shall provide the Government with a Post-installation Acceptance Tests Report after installation of the Laser Writer System within two (2) weeks of installation. The Contractor shall ensure the test report shows the test results for all required tests. Report to be in electronic format. 17. Operator and Maintenance Training: Conduct operator and maintenance training at ARL within three (3) weeks after the Post-Installation Acceptance Tests are completed. The Contractor shall provide two (2) days, a total of 16 hours, of operator and maintenance training for up to eight (8) participants from the Government. The Contractor shall propose a date for operator and maintenance training to the Government within one (1) week of the delivery and installation.. The Government will approve or deny the proposed date and time within three (3) days. 18. Troubleshooting: For the duration of the life of the Laser Writer System, the Contractor shall provide access to a technical support person to answer questions regarding tool operation, hardware troubleshooting, software operation and image capture via telephone or email during normal 0900-1700 business hours for the time zone of the Contractor's main base of operation. The Contractor shall ensure the technical support person responds to voicemails and emails within two (2) business days. 19. Hardware Warranty: The Contractor shall provide a full warranty on the Laser Writer System for one (1) year after approval of the post-installation test report. The warranty includes: Installation and replacement of all parts (excluding consumable parts and materials) at no additional cost to the Government. All repairs or modifications if the Laser Writer System is no longer functional according to the acceptance test specifications at no additional cost to the Government. All labor and transportation costs to and from ARL for repairs and modification if the Laser Writer System is no longer functional according to the acceptance test modifications at no additional cost to the Government. A response time of 48 hours from the time the Government calls or emails in a request for service to diagnose and propose a plan to repair the Laser Writer System. Commencement of repair activities within 96 hours of receiving the Government's call or email for service 20. Software Warranty: Software warranty shall be included for three (3) years beginning the first day after post-installation acceptance tests report approval by the Government. Software warranty to cover all new software issues and upgrades. 21. Complete Schematics (including electrical diagrams): Provide a digital copy of the complete set of schematics (including electrical diagrams) written in English in Portable Document Format (PDF) for the Laser Writer System. 22. The contractor shall be responsible for all shipping costs, insurance and delivery fees. (vii) Delivery is required eight (8) months after receipt of order (ARO). Delivery shall be made to ARL, 2800 Powder Mill Road, Bldg 207 Rm 3B-30., Adelphi, MD 20783-1138. Acceptance shall be performed at Government Location. The FOB point is Destination. (viii) The provision at 52.212-1, Instructions to Offerors - Commercial, applies to this acquisition. The following addenda have been attached to this provision: NONE. (ix) The provision at FAR 52.212-2, Evaluation - Commercial Items is applicable to this acquisition. The specific evaluation criteria to be included in paragraph (a) of that provision are as follows: The Government will award a contract resulting from this solicitation to the responsible offeror whose offer conforms to the solicitation and will be most advantageous to the Government, price and other factors considered. The following factors shall be used to evaluate offers: Technical, Past Performance and Price. The Technical element of the evaluation will be a determination as to whether the proposed product meets the performance characteristics and specifications in the solicitation. The Technical element of the evaluation shall be based solely on information furnished by the vendor. The Government is not responsible for locating or securing any information, which is not identified in the proposal. To ensure sufficient information is available, vendors must furnish as part of their proposal all descriptive material (such as cuts, illustrations, drawings, or other information) necessary for the Government to determine whether the product meets the performance characteristics and specifications of the requirement. If the offeror proposes to modify a product so as to conform to the requirement of this solicitation, the offeror shall include a clear description of such proposed modifications and clearly mark any descriptive materials to show modifications. Past performance will be evaluated based on information provided by the offeror as to actual sales of the proposed product to industry or Government agencies. Past performance will consider the ability of the offeror to meet technical specifications, delivery schedules (with warranty fulfillment and maintenance reputation included as applicable). Offerors shall include two (2) records of sales of tools (with similar capability to the specifications listed in the Contract) from the previous twenty four (24) months. Offerors shall identify a point of contact for each sale by providing a name and telephone number. Price will be evaluated based on the total proposed price, including options, (if any). Technical and past performance are of equal importance and when combined are significantly more important than price. The Government reserves the right to award to other than the lowest price and to award without discussions. (x) Offerors shall include a completed copy of the provision at FAR 52.212-3, Offeror Representations and Certifications - Commercial Items, and DFARS 252.212-7000, Offeror Representations and Certifications -Commercial Items, with its offer. (xi) The clause at 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The following addenda have been attached to this clause None. (xii) The clause at 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items and DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes or Executive Orders Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The following additional FAR/DFARS clauses cited in this clause are applicable: 52.203-3, Gratuites (APR 1984), 52.203-6, Restrictions on Subcontractor Sales to the Government (Sept 2006), 52.203-6 Alt I, Restrictions on Subcontractor Sales to the Government (Oct 1995) 52.204-4 Printed or Copied Double-Sided on Postconsumer Fiber Content Paper (May 2011), 52.204-10, Reporting Executive Compensation and First-Tier Subcontract Awards (Feb 2012), 52.209-6 Protecting the Government's Interest When Subcontracting with Contractors Debarred, Suspended, or Proposed for Debarment (Dec 2010), 52.209-10 - Prohibition on Contracting With Inverted Domestic Corporations (May 2012), 52.219-4 - Notice of Price Evaluation for HUBZone Small Business Concerns (Jan 2011), 52.219-8, Utilization of Small Business Concerns (Jan 2011), 52.219-28, Post Award Small Business Program Representation (Apr 2012), 52.222-3 Convict Labor (June 2003), 52.222-19, Child Labor-Cooperation with Authorities and Remedies (MAR 2012), 52.222-21 Prohibition of Segregated Facilities (Feb 1999), 52.222-26 Equal Opportunity (Mar 2007), 52.222-35 Equal Opportunity for Veterans (Sep 2010), 52.222-36 Affirmative Action for Workers with Disabilities (Oct 2010), 52.222-37 Employment Reports on Veterans (Sep 2010), 52.222-40 - Notification of Employee Rights Under the National Labor Relations Act (Dec 2010), 52.222-50 Combating Trafficking in Persons (FEB 2009) 52.223-18 Encouraging Contractor Policies to Ban Text Messaging While Driving (Aug 2011), 52.225-13 Restriction on Certain Foreign Purchases (Jun 2008), 52.232-33 Payment by Electronic Funds Transfer-Central Contractor Registration (Oct 2003), 52.225-25 Prohibition on Engaging in Sanctioned Activities Relating to Iran-Certification (Sep 2010), 252.203-7000, Requirements Relating to Compensation of Former DoD Officials (SEP 2011), 252.211-7003 Item Identification and valuation (Jun 2011), 252.211-7003 Alt I - Item Identification and valuation (Dec. 2011), 252.225-7001, Buy American and Balance of Payments Program (JUN 2012), 252.225-7012, Preference for Certain Domestic Commodities (JUN 2012), 252.232-7003 Electronic Submission of Payment Requests and Receiving Reports (Mar 2008), 252.243-7002 Requests for Equitable Adjustment (Mar 1998), 252.247-7023, Transportation of Supplies by Sea (MAY 2002), The full text of a clause may be accessed electronically at this/these address(es): http://farsite.hill.af.mil/ and https://www.acquisition.gov/Far/. (xiii) The following additional contract requirement(s) or terms and conditions apply: 52.004-4409 ACC - APG Point of Contact (APR 2011), 52.004-4411 Technical Point of Contact (DEC 2002),52.016-4407 Type of Contract, 52.032-4418 Tax Exemption Certification, 5152.232-4901 Wide Area Workflow (WAWF) Information and Instructions, 52.032-4401 Release of Information by Manufacturers, Research Organizations, Educational Institutions, and Other Commercial Entities Holding Army Contracts, ARL-40- AMC Level Protest Program; 52.011-4401 Receiving Room Requirements, ARL-L41 US Army Contracting Command (ACC-APG) - Adelphi Contracting Division Website. A copy of the full text of these provisions will be made available upon request. (xiv) This acquisition is rated under the Defense Priorities and Allocations System (DPAS) as NOT APPLICABLE. (xv) The following notes apply to this announcement: (a.) All requirements in section (vi) including applicable shipping charges shall be included in quoted price. (xvi) Offers are due on 27 September 2012 09:00AM MST, to phillip.j.amador.civ@mail.mil for the Government's evaluation. All supporting documentation (specification sheet, brochures, drawings, etc.) shall be submitted along with the Quotation. (xvii) For information regarding this solicitation, please contact phillip.j.amador.civ@mail.mil
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/notices/db27bc241553b55b430c9992743bc743)
- Place of Performance
- Address: US Army Contracting Command - APG - Adelphi Contracting Division 2800 Powder Mill Road Adelphi MD
- Zip Code: 20783-1197
- Zip Code: 20783-1197
- Record
- SN02858962-W 20120830/120829000936-db27bc241553b55b430c9992743bc743 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |