SPECIAL NOTICE
A -- Partnership Opportunity for SUMMiT V™ Technology
- Notice Date
- 9/14/2012
- Notice Type
- Special Notice
- NAICS
- 334413
— Semiconductor and Related Device Manufacturing
- Contracting Office
- Department of Energy, Sandia Corp. (DOE Contractor), Sandia National Laboratories, PO Box 5800, MS: 0115, Albuquerque, New Mexico, 87185
- ZIP Code
- 87185
- Solicitation Number
- 12_379
- Archive Date
- 12/1/2012
- Point of Contact
- Alyssa Christy,
- E-Mail Address
-
ajchris@sandia.gov
(ajchris@sandia.gov)
- Small Business Set-Aside
- N/A
- Description
- Background Information: Sandia National Laboratories (SNL) developed the SUMMiT V™ process for making Microelectromechanical Systems (MEMS) devices in the late 1990s, disclosed in U.S. Patent # 6,082,208, Method for Fabricating Five-Level and Microelectromechanical Transmission Formed Thereby, and other U.S. patents. The process has been used extensively to prototype MEMS components and has proven reliable and repeatable when used in the Sandia SiFab on 150mm silicon wafer substrates. Sandia National Laboratories (SNL) is seeking a U.S. industrial partner who is interested in investing in the further development of this technology to migrate the SUMMiT V™ process from production on 150mm wafers to 200mm wafers, and to optimize and produce functioning SUMMiT V™ MEMS devices on 200mm diameter silicon wafers at their company. Sandia is a multi-program laboratory operated by Sandia Corporation, a wholly owned subsidiary of Lockheed Martin Corporation, for the United States Department of Energy's National Nuclear Security Administration under Contract DE-AC04-94AL85000. Opportunity Description: SNL is seeking to partner with a U.S. industrial partner, under a Cooperative Research and Development Agreement (CRADA), who is capable of commercial fabrication with established expertise in fabricating MEMS on 200mm wafers. The objective of this partnership would be for the industrial partner to migrate the SUMMiT V™ process from production on 150mm wafers to 200mm wafers, and use the SUMMiT V™ process, in whole or in part, to fabricate MEMS on 200mm wafers for commercial product development and/or production. SNL personnel have the expertise to maintain the SUMMiT V™process and to apply the process to a wide variety of component types and produce working parts with high yield. The industrial partner will work with SNL to create a fabrication process for MEMS designs using the SUMMiT V ™ process, which can be produced reliably on 200mm wafers and result in functioning devices at the U.S. facility owned by the industrial partner that have wafer and device yield as good as or better than the current process run at the 150mm SNL facility. The industrial partner will transfer the modified process back to SNL for use. The industrial partner will contribute resources, including CRADA funds-in support to SNL, which is estimated to be between $500k and $1M, or more, depending on the technical expertise of the industrial partner. In addition, the industrial partner will contribute CRADA in-kind support in the form of engineering staff that are US citizens, and fabrication facilities deemed capable of producing SUMMiT V MEMS components with the ability to process and handle ITAR materials. The industrial partner will have the option to obtain, up to and including an exclusive license to the intellectual property for the SUMMiT process as part of a CRADA agreement; and will have the ability to produce SUMMiT parts for other customers. Jointly created IP under the CRADA will be jointly owned. Information Sought: A detailed description of relevant background experience, expertise, and capabilities that could be brought into a collaborative CRADA partnership with SNL is being sought. The following information is being requested. In addition, interested parties may provide additional relevant information as needed. •Description of experience, expertise and capabilities in the design, development, and manufacturing of fabricating MEMS on 200mm wafers. •Description of manufacturing facilities available. (Class of cleanroom, tools available, etc.) •Description of testing facilities available. •Description of current products produced. (Types of processes required, volume and duration of production.) •Description of staff and engineering resources, including relevant expertise and time available to commit to the project. •Description of prior tech transfer experience. •Description of other relevant experience, expertise, and capabilities. •Description of past experience partnering with Research and Development organizations such as Federally Funded Research and Development Centers (FFRDC), Universities, National Laboratories, or Government Laboratories to successfully develop and deploy products. Instructions to Responders: Interested parties that meet the Mandatory Requirements provided below are invited to respond to this FBO. Responses should be limited to twenty (20) pages, not including the required cover page. Any proprietary information should be properly identified and marked as such. Any information provided in response to this FBO will not be returned. Any and all responses are voluntary and SNL will not pay for any information submitted in response to this FBO. The attached cover page is required for all responses. Only electronic submissions will be accepted. Responses should be emailed to ajchris@sandia.gov and should include the FBO title and submitting organization's name in the subject line. Attachment size should not exceed 5MB and only the following document types will be accepted (.doc,.docx,.pdf). Responses should be submitted electronically no later than 5:00 p.m. MDT on November 16, 2012. An email notification will be sent acknowledging successful receipt of the response. Evaluation Criteria: SNL is seeking the partner offering the fastest path to success with the highest probability. Further, the partner must be able to fabricate SUMMiT V TM devices for U.S. national security customers. SNL will evaluate all responses and select prospective parties with which to engage in further discussions based on the following criteria, pursuant to SNL's Technology Transfer mission: Mandatory Requirements: 1.U.S. firms able to enter into a CRADA agreement with SNL. 2.Firms must be able to ensure products developed as a result of this partnership are manufactured largely in the United States by U.S. citizens, at U.S.-owned and controlled companies. 3.Compliance with Federal Export Control requirements per the Department of State. 4.Firms must be capable of providingan estimated funds-in contribution between $500k and $1M, or more, depending on the technical expertise of the industrial partner. 5.Firms capable of providing in-kind support in the form of engineering, manufacturing, or testing staff. 6.Ability to handle ITAR materials. Respondents to this Request for Information that do not meet the Mandatory Requirements will not be given any further consideration by SNL. Desired Requirements: 1.Demonstrated experience, expertise and capabilities in the design, development, and manufacturing of fabricating MEMS on 200mm wafers. 2.Demonstrated experience with multi-level Si technology. 3.Demonstrated experience with converting from 150mm to 200mm toolsets. 4.Ability to handle all, or majority, of SUMMiT V processes in-house, including Chemical Mechanical Polishing (CMP). 5.Demonstrated experience with successfully transferring technologies from outside the organization. 6.Demonstrated successful partnering and teaming relationships with Research and Development organizations 7.Verifiable evidence of demonstrated past performance and related experience in the ability to test, manufacture, license, protect, and deliver on contracts. Past Performance and Related Experience: Past performance is a measure of the degree to which a Responder satisfied its customers in the past and complied with Federal, state, and local laws and regulations. SNL may contact Responder's customers/references to ask whether or not the: 1. Responder was capable, efficient, and effective; 2. Responder's performance conformed to the terms and conditions of its contract; 3. Responder was reasonable and cooperative during performance; and 4. Responder was committed to customer satisfaction. In evaluating past performance, SNL may utilize any sources of factual information including sources not included in the Responder's response. In order for SNL to review Responder's Past Performance and Related Experience, the Responder must provide the following information on the two most recent projects of similar size and closely related to this technology development: 1. Contract or Project Number: 2. Date of award: 3. Full Project Title: 4. Project Customer: 5. Project Contact: 6. Project Contact Phone and Address: 7. Initial Contract Schedule: 8. Final Contract Duration: (Explain reasons for durations exceeding original contract schedules). 9. Initial Contract Award Amount: 10. Final Contract Amount: 11. Number of Project Related Safety Incidences: Primary Point of Contact: Alyssa Christy Technical Business Development Specialist Sandia National Laboratories ajchris@sandia.gov Keywords: MEMS, microelectromechanical systems, 200mm, silicon fabrication facility, SiFab, Fab, Sandia, SNL, silicon wafer substrates, fabrication, SUMMIT V, cleanroom, semiconductor, microsystems
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