SPECIAL NOTICE
66 -- "NOTICE OF INTENT TO AWARD A SOLE SOURCE - ELECTRON-BEAM LITHOGRAPHY SYSTEM" - Intent to Sole Source
- Notice Date
- 11/7/2012
- Notice Type
- Special Notice
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of the Navy, Office of Naval Research, Naval Research Laboratory, 4555 Overlook Ave. S.W., Washington, District of Columbia, 20375
- ZIP Code
- 20375
- Solicitation Number
- N00173-13-R-RH03
- Archive Date
- 12/7/2012
- Point of Contact
- Richard W. Hobson, Phone: 2024046199
- E-Mail Address
-
richard.hobson@nrl.navy.mil
(richard.hobson@nrl.navy.mil)
- Small Business Set-Aside
- N/A
- Description
- Intent to Sole Source SYNOPSIS DESCRIPTION NOTICE OF INTENT TO AWARD SOLE SOURCE PROCUREMENT FOR A electron-beam lithography system. The Naval Research Laboratory (NRL) intends to award a contract on the basis of other than full-and-open competition to Raith, Inc. for an electron-beam lithography system and associated components. The required system shall, as a minimum have: 1) 50 kV acceleration voltage 2) Pure electrostatic deflection system 3) 500 µm write field 4) 18 bit resolution 5) 50 MHz pattern generator 6) 10 nm minimum linewidth 7) Laser interferometer stage with 150 mm x 150 mm travel range 8) < 35 nm stitching error (3 σ) 9) Zero stitching error lithography based on moving stage technology 10) Automatic loadlock 11) Handling up to 200 mm wafers 12) Compact footprint 13) US-based support infrastructure Vendors who feel capable of meeting all the requirements stated above shall, within 15 days after publication of this synopsis, fully identify their interests and submit written data and verifiable documentation that demonstrates conclusively the capabilities of their proposed equipment to meet the stated requirements. Responses received after 15 days or without the required documentation will be determined non-responsive to the synopsis, and will not be considered further.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DON/ONR/N00173/N00173-13-R-RH03/listing.html)
- Record
- SN02926399-W 20121109/121107235348-321c4feb795e8458e88da432df0be68b (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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