SOLICITATION NOTICE
66 -- JEOL Electron-Beam Lithography System
- Notice Date
- 6/27/2013
- Notice Type
- Presolicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 1640, Gaithersburg, Maryland, 20899-1640, United States
- ZIP Code
- 20899-1640
- Solicitation Number
- NB620010-13-01483
- Archive Date
- 7/25/2013
- Point of Contact
- Todd D Hill, Phone: 301-975-8802, Patrick Staines, Phone: (301)975-6335
- E-Mail Address
-
todd.hill@nist.gov, patrick.staines@nist.gov
(todd.hill@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- DESCRIPTION: The National Institute of Standards and Technology (NIST) intends to negotiate, on a sole source basis, under authority of 41 U.S.C. 253(c)(1) with JEOL USA, 11 Dearborn RD, Peabody, MA 01960-3862, for the purchase of a JEOL JBX-6300 Electron Beam Lithography tool. The system will be sited and used as a shared resource in the NIST Center for Nanoscale Science and Technology (CNST) NanoFab, part of a national nanotechnology user facility accessible to researchers from industry, academia, NIST, and other government agencies. Sole source determination is based on the NIST requirements as follows: The NIST CNST NanoFab currently owns and operates a JEOL JBX-6300 e-beam lithography system that is heavily used for a wide range of projects. Because nanoscale lithography is critical to a growing number of research projects, the demand for this system has steadily increased. With increasingly heavy tool usage, the time needed for repair and maintenance of the current e-beam system has also increased such that demand for the NanoFab e-beam lithography capability provided by the JEOL JBX-6300 now exceeds the capacity of our existing tool (which is already available 24 hours per day, 7 days per week). To resolve this problem, NIST requires an additional and redundant e-beam lithography system. The primary functionalities of the system that must be interchangeable are as follows: SAMPLE HOLDER: The system shall be supplied with 50 mm, 75 mm, 100 mm, 150 mm, and 200 mm sample holders. These substrate handling cassettes shall be fully compatible with NIST's existing JEOL JBX-6300 and enable cassettes and samples to be transferred seamlessly between the two systems. CURVED SURFACE WRITING: The system shall be capable of automatically adjusting and exposing non-planar surfaces with height variations of at least1 mm across the substrate. This component shall be fully integrated with the instrument and allow backward compatibility for use with NIST's current JEOL JBX 6300. SOFTWARE: Existing users of CNST's JEOL JBX 6300 shall be able to operate the system with little or no retraining, and new users trained on one system shall be able to operate the other with little or no additional training. The operating control of the system shall be fully compatible and similar in job definition and pattern formatting to the JEOL JBX 6300, using compiled magazine files (.mgn) to run exposures. JEOL designed, manufactured, and supports the existing e-beam system installed at NIST. NIST requires redundancy with the existing system as well as the ability to leverage the cost of maintenance, repair, and user training while maximizing tool availability and the productivity of NanoFab users. JEOL does not license their EBL technology and therefore no other manufacturer has the ability to supply a redundant electron beam lithography system. As a result, JEOL is uniquely qualified to provide the required e-beam system for this procurement. JEOL USA is the sole manufacturer of the equipment which includes unique and proprietary capabilities that are required to satisfy the Government's minimum requirements. Delivery shall be FOB Destination and be completed in accordance with the Contactor's commercial schedule. As defined in the federal Acquisition Regulation (FAR), FOB Destination means: The contractor shall pack and mark the shipment in conformance with carrier requirements, deliver the shipment in good order and condition to the point of delivery specified in the purchase order, be responsible for any loss of and/or damage to the goods occurring before receipt and acceptance of the shipment by the consignee at delivery point specified in the purchase order, and pay all charges to the specified point of delivery. The contractor shall deliver all line items to NIST, Gaithersburg, Maryland, 20899-0001. The North American Industrial Classification System (NAICS) code for this acquisition is 334516, and the size standard is 500 Employees. No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, the government will consider responses received by 10 July 2013. A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB620010-13-01483/listing.html)
- Place of Performance
- Address: NIST, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN03102289-W 20130629/130628001240-d53ef7afe39a5972d96433990cca3dbd (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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