SOLICITATION NOTICE
66 -- RF Generator and Match Network to Repair SPTS Omega c2L Rapier Etch System
- Notice Date
- 1/15/2016
- Notice Type
- Presolicitation
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- NB620010-16-01331
- Archive Date
- 1/20/2016
- Point of Contact
- Cory L. Worley, Phone: 3019753635, Patrick K Staines, Phone: (301)975-6335
- E-Mail Address
-
cory.worley@nist.gov, patrick.staines@nist.gov
(cory.worley@nist.gov, patrick.staines@nist.gov)
- Small Business Set-Aside
- N/A
- Description
- The Department of Commerce, National Institute of Standards and Technology (NIST), Center for Nanoscale Science and Technology (CNST) NanoFab intends to negotiate a firm fixed price purchase order, on a sole source basis, with SPTS Technologies for the purchase of a RF Generator and Match Network for NIST's existing SPTS Omega c2L Rapier Deep Silicon Etch System under other than full and open competition by the authority of FAR subpart 13.106-1(b)(1)(i). The NIST CNST supports the U.S. nanotechnology enterprise from discovery to production by providing industry, academia, NIST, and other government agencies with access to world-class nanoscale measurement and fabrication methods and technology. The CNST's shared-use NanoFab gives researchers economical access to and training on a commercial state-of-the-art tool set required for cutting-edge nanotechnology development. This world-class shared resource provides researchers with a unique combination of a simple application process, extensive tool and process development, hands-on training, and access to NIST-wide expertise in nanoscience and nanotechnology. The CNST NanoFab has a need for a RF Generator and Match Network to repair the CNST NanoFab SPTS Omega c2L Rapier deep silicon etch system. The SPTS Omega c2L Rapier deep silicon etcher uses a RF Generator to ionize molecules in the etch chamber to create the etch plasma. The Match Network balances the load on the RF generator to provide a constant load while minimizing reflected power which can damage the generator. The etcher cannot be run without the RF Generator and Match network. The SPTS Omega c2L Rapier Deep Silicon Etch System is unique in that it is capable of etching deep features in silicon. The tool uses fast switching Bosch process that produces smooth sidewall profiles while etching silicon up to 30 µm per minute. This tool is critical to the operation of the CNST NanoFab and there is no other type of tool within the CNST NanoFab that has this capability. Without the operation of the CNST NanoFab SPTS Omega c2L Rapier Deep Silicon Etch System, the CNST NanoFab mission is at stake. Due to this system being inoperable researchers both inside and outside of NIST are unable to complete scheduled research undertakings. NIST CNST NanoFab requires this system to operational in order to keep its world-class research facility status. The operation of this system is mission critical. It is an urgent need that this system become operational for the sake of the CNST NanoFab mission. The RF Generator and Match Network supply a high voltage at a high frequency to ionize molecules in the etch chamber of the SPTS Omega c2L Rapier Deep Silicon Etch System. The RF Generator and Match Network are customized by SPTS to work with NIST CNST NanoFab system. The customizations are proprietary to SPTS and it does not make the technology available to any other vendor. No other parts can be substituted. Delivery shall be FOB Destination, Gaithersburg, MD, and be completed in accordance with the Contractor's commercial schedule. This requirement is expected to be awarded in January 2016. The North American Industry Classification System (NAICS) code for this acquisition is 333242 Semiconductor Machinery Manufacturing, with a corresponding size standard of 500 employees. No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, interested persons may identify their interest and capability to respond to this requirement. The Government will consider responses received by 10:00 a.m. Eastern on January 19, 2016. Inquiries will only be accepted via email to cory.worley@nist.gov. No telephone requests will be honored. A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/NB620010-16-01331/listing.html)
- Record
- SN03994163-W 20160117/160115234413-3d6b733ad529c76fe2aca67a155508f2 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
| FSG Index | This Issue's Index | Today's FBO Daily Index Page |