SOLICITATION NOTICE
66 -- Mercury Probe System - Combined Synopsis/Solicitation
- Notice Date
- 3/7/2017
- Notice Type
- Combined Synopsis/Solicitation
- NAICS
- 334516
— Analytical Laboratory Instrument Manufacturing
- Contracting Office
- Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition Management Division, 100 Bureau Drive, Building 301, Room B130, Gaithersburg, Maryland, 20899-1410, United States
- ZIP Code
- 20899-1410
- Solicitation Number
- SB1341-17-RQ-0198
- Archive Date
- 3/30/2017
- Point of Contact
- Forest Crumpler, Phone: 3019756753
- E-Mail Address
-
forest.crumpler@nist.gov
(forest.crumpler@nist.gov)
- Small Business Set-Aside
- Total Small Business
- Description
- **** Please Note: Full details, including Terms and Conditions, for this solicitation are found on the attached Solicitation document. Please see this attachment for the complete solicitation. **** THIS IS A COMBINED SYNOPSIS/SOLICITATION FOR COMMERCIAL ITEMS PREPARED IN ACCORDANCE WITH THE FORMAT IN FAR SUBPART 12.6-STREAMLINED PROCEDURES FOR EVALUATION AND SOLICITATION FOR COMMERCIAL ITEMS-AS SUPPLEMENTED WITH ADDITIONAL INFORMATION INCLUDED IN THIS NOTICE. THIS ANNOUNCEMENT CONSTITUTES THE ONLY SOLICITATION; QUOTATIONS ARE BEING REQUESTED, AND A WRITTEN SOLICITATION DOCUMENT WILL NOT BE ISSUED. THIS SOLICITATION IS BEING ISSUED USING SIMPLIFIED ACQUISITION PROCEDURES UNDER THE AUTHORITY OF FAR 13.5 TEST PROGRAM FOR CERTAIN COMMERCIAL ITEMS. This solicitation is a request for quotation. The solicitation document incorporated provisions and clauses are those in effect through Federal Acquisition Circular (FAC) 2005-95, effective January 13, 2017. The associated North American Industrial Classification System (NAICS) code for this procurement is 334516 with a small business size of 1000 employees. This acquisition is 100% set-aside for small business. 1352.215-72 INQUIRIES (APR 2010) Offerors must submit all questions concerning this solicitation in writing to forest.crumpler@nist.gov. Questions should be received no later than 5 calendar days after the issuance date of this solicitation. Any responses to questions will be made in writing, without identification of the questioner, and will be included in an amendment to the solicitation. Even if provided in other form, only the question responses included in the amendment to the solicitation will govern performance of the contract. The backup point of contact is Patrick Staines at Patrick.Staines@nist.gov. (End of Provision) BACKGROUND: The National Institute of Standards and Technology (NIST) has a requirement for a Mercury Probe Mapping System to support nanofabrication activities in the Center for Nanoscale Science and Technology (CNST), NIST's nanotechnology user facility. The mapping system shall be sited and used in the CNST NanoFab Class 100 clean room as a shared resource accessible to researchers from industry, academia, NIST, and other government agencies The NIST CNST NanoFab presently operates a sheet resistance measurement tool based on the four-point probe technique. This tool does not have the capability of measuring resistances higher than 8x10^11 ohms. The need exists for a system capable of measuring the resistance of highly insulating films, such as silicon dioxide, which can exhibit resistances as high as 1x10^23 ohms. This acquisition is for one (1) Mercury Probe System. The Contractor Contractorshall provide a Firm Fixed Price quotation for the following Contract Line Items (CLIN): CLIN0001 - The Contractor shall provide a quantity of One (1), Mercury Probe System which shall meet or exceed the Minimum Specifications identified below. A.GENERAL DESCRIPTION: a.The mapping system shall be a bench-top unit. b.The system shall be equipped with a computer controlled motorized stage. c.The system shall measure single points as well as map an entire wafer at multiple points. d.The measurement shall be obtained via a small mercury contact with the sample. e.The wafer handling shall be manual, one wafer at a time, without cassette loader. f.The system shall be compatible with Class 100 (ISO 5) clean room environment B.SUBSTRATE CAPABILITY: a.The system shall be capable of measuring wafers ranging from 1 cm x 1 cm square chips up to 200 mm in diameter. b.The system shall be able to handle wafers ranging in thickness from 100 micrometers to 2.5 millimeters. C.MEASUREMENT CAPABILITY The tool shall be able to measure the following: a.Current versus voltage b.Capacitance versus voltage c.Charge versus voltage d.Current versus time e.Capacitance versus time f.Charge versus time g.Bias form: step up, step down, pulsed, ramp up, ramp down h.Switching between C-V and I-V measurement shall not require any hardware change, but be accomplished via software only D.FUNCTIONAL CAPABILITY The tool shall be able to extract the following characteristics from the measurement data: a.Resistance and resistivity b.Breakdown voltage c.Charge density d.Oxide thickness e.Carrier lifetime f.Interface traps distribution g.Charge at breakdown h.Leakage current i.Dielectric constant j.Pinhole density k.Flatband voltage l.K value of dielectric films E.PARAMETERS CAPABILITY: a.Capacitance measurement range: 0 to 20 nF. b.Frequency: DC to 10 kHz, selectable c.Voltage pulse shape: the AC input signal shall be a square wave d.Current measurement range: 50 fA to 1 mA e.Bias: -100 V to 100 V. f.Mercury contact area range: 2 x 10^-5 cm^2 to 0.8 cm^2 F.SAFETY The vendor shall provide evidence of the following features: a.System certification to the SEMI S2 and S8 standards b.Complete absence of mercury vapor while in operation, or standby state, with cover open or closed c.The mercury reservoir shall be designed so as to allow continuous operation of the system for a minimum period of 3 months without refill G.MERCURY PROBES a.Probe and mercury reservoir design i.The mercury probe shall be facing up ii.The mercury shall be sucked by vacuum only after the facing-down wafer is in contact with the probe orifice iii.A fresh mercury drop shall be used for each data point (to prevent oxidized or dirty mercury from adhering to the wafer, and obtain repeatable readings) iv.The used mercury shall be flushed back to the reservoir top v.The fresh mercury shall be drawn from the center or bottom of the reservoir b.Probe sizes. The vendor shall offer four probe types producing the following mercury dot sizes. i.Large dot: area 0.02 cm^2 This probe to be used for defect/pinhole density measurement ii.Small dot: area 2E-4 cm^2 to 6E-4 cm^2 (exact size TBD) This probe to be used for general purpose I-V and C-V iii.Ultra-small dot: area 2E-5 cm^2 to 1E-4 cm^2 (exact size TBD) This probe to be used for ultra-shallow junctions, intrinsic semiconductors or spreading resistance measurement iv.Dot-ring: dot area 3E-3 cm^2 This probe to be used on films deposited on insulating or semi-insulating substrates where the back of the wafer cannot be used for return current H.SOFTWARE: a.Windows 7 required b.Electronics shall be operated by real time embedded DOS c.All data files must be exportable to Excel. d.The system shall be SECS-II compliant. e.The mapping patterns available shall include: i.Polar maps ii.Rectangular/Cartesian maps iii.User-defined patterns f.The plot displays available shall include: i.Contour maps ii.3D maps iii.Data maps I.ACCESSORIES: a.C-V map calibration wafer or set b.Ionized air blower c.Extra mercury reservoir CLIN0002 - The Contractor shall provide a quantity of One (1), training session, consisting of a minimum of two days of on-site training at the NIST Gaithersburg facility. This training shall cover, at a minimum, the basic operation and maintenance of the tool. CLIN0003 (OPTION) - The Contractor shall provide a quantity of One (1), Hardware and software to extend the frequency range up to 10 MHz, including an appropriate LCR meter. CLIN0004 (OPTION) - The Contractor shall provide a quantity of One (1), Hardware and software to extend the bias voltage range to +/- 1000 V, including an appropriate high voltage source meter. CLIN0005 (OPTION) - The Contractor shall provide a quantity of One (1), NIST-traceable resistance standard wafer in the range 10^15 or 10^16 ohm*cm
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOC/NIST/AcAsD/SB1341-17-RQ-0198/listing.html)
- Place of Performance
- Address: 100 Bureau Drive, Gaithersburg, Maryland, 20899, United States
- Zip Code: 20899
- Zip Code: 20899
- Record
- SN04426007-W 20170309/170307234916-c4e881071105e9211524811818fe723c (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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