SOLICITATION NOTICE
66 -- SEM (scanning electron microscope) - Nano-X-FIB SEM specs
- Notice Date
- 4/19/2018
- Notice Type
- Presolicitation
- NAICS
- 333999
— All Other Miscellaneous General Purpose Machinery Manufacturing
- Contracting Office
- Department of Energy, SLAC National Accelerator Lab, SLAC National Accelerator Lab, 2575 Sand Hill Road, Menlo Park, California, 94303, United States
- ZIP Code
- 94303
- Solicitation Number
- SLAC_Nano_X_FIB_SEM
- Archive Date
- 5/8/2018
- Point of Contact
- Katherine A. Coh, Phone: 6509262770
- E-Mail Address
-
kcoh@slac.stanford.edu
(kcoh@slac.stanford.edu)
- Small Business Set-Aside
- N/A
- Description
- tech specs SLAC National Accelerator Laboratory is operated by Stanford University for the Department of Energy. As a management and operating contractor, subcontracts awarded by the Laboratory are not Federal procurements, and are not directly subject to the Federal Acquisition Regulations in 48 CFR. Nonetheless, certain Federal laws, Executive Orders, and regulations may affect our DOE approved purchasing system, as required by statute, regulation, or contract terms and conditions. Procurement Requirements The Supplier shall furnish, deliver, and install a field emission SEM (scanning electron microscope) with future in-field upgradeability to a FIB-SEM dual-beam instrument. Specification Summary: This procurement specification is for a field emission SEM with electron optics for fast high resolution analytics (2.5 nm or better, at 1 kV and 1.0 nm at 15kV). The electron beam source should be a Schottky field emission source, optimized for use with a Ga-focused Ion beam. Components of the system are listed and described in detail in subsequent individual sections below. All components listed are to be included in a single proposal. The system must be "turn-key" i.e. all hardware and software is to be installed, configured and tested by the Supplier. The proposal must include delivery and installation of the system described herein, testing of all components and initial on-site training of SLAC scientist. The supplier shall take final responsibility for the compatibility and performance of all components of the proposal system. The SEM must be controlled through a personal computer-based graphical user interface (GUI). Operating system must be Windows XP, Service Pack 3, later upgradeable to Windows 7. The computer must include an Ethernet card and a CD/R or DVD-R/W drive and be supplied with, at least, one flat panel color monitor. 1) Electron Optical System • Schottky field emission source with a stability of < 0.2 %/hour • Acceleration voltage from 20V-30kV, continuously variable in 10V steps • Single aperture in a double condenser system with compensated alignment depending on probe current settings • Electromagnetic/electrostatic objective lens design with reduced magnetic field around the sample to facilitate high resolution imagining • Allows for simultaneous high resolution SEM imaging during FIB milling • Resolution of SEM/FIB coincidence point: 2.5nm at 1kV, 1.0nm at 15kV (for future upgrade) • Magnification range 12x - 2,000,000x, continuously adjustable in either coarse or fine modes. • Automatic focus control and compensation • Rotation compensation • Chamber mounted plasma cleaner for removal of hydrocarbon contamination from both sample and chamber. Integrated software control for user defined cleaning cycles without user interaction after starting the cleaning process. • Two infrared CCD cameras for chamber viewing • Oil free vacuum system, fully automatic, with automatically operated pneumatic column isolation valve. • Specimen current monitor with integrated touch alarm • Quick sample transfer system with gate valve that is fully integrated in the standard vacuum system and the microscope control. 2) Electronics and detectors • Scan systems • In-lens secondary electron detector (SE) • In-lens backscatter electron detector with energy filtering for contrast-tuning and acquisition of low-loss BSE. Filtering grid adjustable from 0V to -1.5kV • Chamber mounted high efficiency secondary electron (SE) detector • Retractable high efficiency 4 quadrant solid state BSE detector • Large frame store up to 32k x 32k pixels. 3) Software • Workflow oriented high throughput acquisition platform supporting fusion of images from multiple instruments, detectors, and sessions in one correlative workspace • Arbitrary scan field to image only what is needed. • Semi-automated stitching and data processing routines • Post processing tools like automated stitching, batch stitching, image corrections and advanced import and export functions. 4) Chamber and stage • 6-axes motorized super eucentric stage operated by dual joystick • Large specimen chamber with minimum size of 330mm inner diameter and 270mm height • Airlock with at least 80 mm chamber, fully integrated • Plasma cleaner, fully integrated with software control 5) Miscellaneous • The system must include a workstation (table) capable of supporting the pulse processor, PC (with keyboard and mouse), and computer monitor. Proposal must include an illustration and the dimensions of the workstation to be supplied. • System must be UL compliant • One-year (or longer) warranty on the entire system. 3) Optional Features- A high performance Focused Ion Beam column can be added to the system as an independent option. A beam blanker on the electron beam column can be added to the system as an independent option. Additional options could include longer warranty, complimentary service contract, free phone technical support, etc.
- Web Link
-
FBO.gov Permalink
(https://www.fbo.gov/spg/DOE/SLAC/STAN/SLAC_Nano_X_FIB_SEM/listing.html)
- Place of Performance
- Address: SLAC National Accelerator Laboratory, 2575 Sand Hill Road, Menlo Park, California, 94025, United States
- Zip Code: 94025
- Zip Code: 94025
- Record
- SN04894930-W 20180421/180419230524-64e6bd6f3997610f96f8809c8ff1d8d6 (fbodaily.com)
- Source
-
FedBizOpps Link to This Notice
(may not be valid after Archive Date)
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