Loren Data's SAM Daily™

SAMDAILY.US - ISSUE OF NOVEMBER 11, 2020 SAM #6922
SPECIAL NOTICE

36 -- Metal Etch Inductively Coupled Plasma Reactive Ion Etching (ICP - RIE) Tool

Notice Date

11/9/2020 1:06:37 PM
 

Notice Type

Special Notice
 

NAICS

333242 — Semiconductor Machinery Manufacturing
 

Contracting Office

NAVAL RESEARCH LABORATORY WASHINGTON DC 20375-5328 USA
 

ZIP Code

20375-5328
 

Solicitation Number

N00173-20-Q-TS02
 

Response Due

9/25/2020 9:00:00 AM
 

Archive Date

10/10/2020
 

Point of Contact

Todd Schwartz
 

E-Mail Address

todd.schwartz@nrl.navy.mil
(todd.schwartz@nrl.navy.mil)
 

Description

The U.S. Department of Navy, Naval Research Laboratory (NRL) Contracting Division, proposes to enter into a sole source contract with Oxford Instruments America, Inc., for the procurement of an inductively coupled plasma reactive ion etcher (ICP-RIE) Tool using Chlorine and Fluorine chemistries in accordance with FAR 13.501(a) and 41 USC 1901, as no other system was capable of meeting the specifications required by NRL. The Tool must be capable of dry etching a wide variety of materials including but not limited to Metal Oxides, mixed Metal Oxides, Nitrides, Carbides, Silicides, Tellurides, Selenides, Nickel, Chrome, and Aluminum. The Tool is to be installed within a Class 100 clean room. It is intended for use by multiple users within that site, must be computer controlled via menu-driven software, and user friendly. The contemplated contract type will be a Firm Fixed Price (FFP).� This notice is not a request for the receipt of proposals or competitive offers. A determination by the Government to compete or not, is solely within the discretion of the Government. The PSC is 3670 and the NAICS is 333242.
 

Web Link

SAM.gov Permalink
(https://beta.sam.gov/opp/8b67fbe87b1f432f8ec56d04a6a2a20f/view)
 

Place of Performance

Address: Washington, DC 20375, USA

Zip Code: 20375

Country: USA
 

Record

SN05849120-F 20201111/201109230137 (samdaily.us)
 

Source

SAM.gov Link to This Notice
(may not be valid after Archive Date)

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