SPECIAL NOTICE
99 -- Notice of Intent to Sole Source - Foundry Fabrication for Microdevices - 2D MEMS piston array SLMs
- Notice Date
- 11/19/2020 3:22:29 AM
- Notice Type
- Special Notice
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- DEPT OF COMMERCE NIST GAITHERSBURG MD 20899 USA
- ZIP Code
- 20899
- Solicitation Number
- NIST-NOI-20-MEMS
- Response Due
- 12/2/2020 2:00:00 PM
- Archive Date
- 12/17/2020
- Point of Contact
- Forest Crumpler
- E-Mail Address
-
forest.crumpler@nist.gov
(forest.crumpler@nist.gov)
- Description
- The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate a firm fixed price purchase order, on a sole source basis, with Silterra Malaysia SND. BHD. of Lot 8 Phase II, Hi-Tech Park, Kulim, Kedah, 09000, Malaysia for the purchase of Foundry Fabrication. The statutory authority for this sole source acquisition is FAR 13.106-1(b) by the authority of FAR Part 13 Simplified Acquisition Procedures. The National Institute of Standards and Technology (NIST)/Microsystems and Nanotechnology Division (MND) develops integrated microsystems by advancing the state of the art in nanofabrication to enable the transfer of NIST measurement technologies to the industrial, academic, and government communities. This purchase is necessary to develop new measurement methods and facilitate technology transfer of NIST advanced measurement technologies. NIST MND is seeking responsible parties to supply foundry fabrication services for microdevices. We are specifically looking for respondents capable of economically developing, implementing and providing low-volume microfabrication of 2D MEMS piston mirror array spatial light modulators (SLMs) according to NIST design and specifications. NIST is seeking to ultimately demonstrate a path to megapixel scale integrated CMOS-driven MEMS SLMs in the visible and near IR with pixel pitch of 10 micrometers or less. � The minimum capabilities are as follows: Demonstrated capability of monolithic integration of MEMS with CMOS drive circuitry at wafer scale on 150 mm or larger diameter silicon wafers. Ability to offer MEMS development microfabrication runs whereby micromirror, actuator and actuator designs can be built on wiring layers and tested individually and in small 2D arrays with external drivers. The microfabrication process should be fully compatible with later CMOS integration. Ability to use high resolution commercial optical lithography tools to pattern structural features smaller than 200 nm. Electron beam lithography is explicitly excluded. Ability to make structural features out of low and controlled residual stress polysilicon, single crystal silicon or a similar material not subject to long-term and thermally-induced stress changes. This is required for precision analog actuation. The performer is initially expected to offer and provide a feasibility run implementing a wiring layer and MEMS SLM test devices and arrays and provide several wafers to NIST for evaluation. Extensive market research has been performed and it has been determined that Silterra is the only company that has demonstrated the capability to meet the requirements listed above and included in the attached Statement of Work. The North American Industry Classification System (NAICS) code for this acquisition is 333242 � Superconductor Machinery Manufacturing, and the size standard is 1,500 employees. No solicitation package will be issued.� This notice of intent is not a request for competitive quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. The Government will consider responses received by 5:00 p.m. Eastern on December 02, 2020. Inquiries will only be accepted via email to forest.crumpler@nist.gov . No telephone requests will be honored.�� A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for the purpose of determining whether to conduct a competitive procurement in the future.�
- Web Link
-
SAM.gov Permalink
(https://beta.sam.gov/opp/490271eade03467a851e085f3edce39c/view)
- Place of Performance
- Address: Gaithersburg, MD 20899, USA
- Zip Code: 20899
- Country: USA
- Record
- SN05856776-F 20201121/201119230223 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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