Loren Data's SAM Daily™

SAMDAILY.US - ISSUE OF DECEMBER 08, 2022 SAM #7678
SPECIAL NOTICE

66 -- Notice of Intent to Sole Source ESC Replacement to Repair SPTS Omega c2L Rapier Etch System

Notice Date

12/6/2022 2:19:57 PM
 

Notice Type

Special Notice
 

NAICS

811210 —
 

Contracting Office

NATIONAL INSTITUTE OF STANDARDS AND TECHNOLOGY US
 

ZIP Code

00000
 

Solicitation Number

NB6800002300361
 

Response Due

12/21/2022 9:00:00 AM
 

Point of Contact

Elizabeth Timberlake, Phone: 301-975-6002, Forest Crumpler
 

E-Mail Address

elizabeth.timberlake@nist.gov, forest.crumpler@nist.gov
(elizabeth.timberlake@nist.gov, forest.crumpler@nist.gov)
 

Description

The National Institute of Standards and Technology (NIST) Acquisition Management Division intends to procure and install a new electrostatic chuck (ESC) to repair high helium flow errors on the CNST NanoFab SPTS Omega c2L Rapier deep silicon etch system.� The SPTS Omega c2L Rapier deep silicon etcher ESC has failed, thus created high helium flow error preventing the process from running. The etcher cannot be run without the ESC and ours is broken.� The United States Department of Commerce (DOC), National Institute of Standards and Technology (NIST), Acquisition Management Division (AMD) intends to negotiate a firm fixed price purchase order, on a sole source basis, with SPTS/KLA Corporation to procure and install a new electrostatic chuck (ESC).� The statutory authority for this sole source acquisition is FAR 13.106-1(b) by the authority of FAR Part 13 Simplified Acquisition Procedures.� This tool is unique in that it is capable of etching deep features in silicon. The tool uses a fast-switching Bosch process that produces smooth sidewall profiles while etching silicon up to 30 �m per minute. No other type of tool has this capability, and we only have one of them.� This loss of capability is a serious problem for NanoFab users, with several users requesting daily updates on its status.� The patented thick ESC allows wafer-less plasma cleans for best process stability and clamping and is integrated into the proprietary control software of the SPTS Omega c2L Rapier deep silicon etch. The software controls all functions of the etch system and is proprietary to SPTS. They do not make the technology available to any other vendor. No other vendor has the needed information to work on the system.� �SPTS/KLA Corporation has the responsibility of maintaining these unique systems. The vendor maintains service engineering availability and can have a person onsite quickly once an order is received.� We have performed an extensive Internet search to find vendors to provide the needed service that we may not have been aware of.� In no case can we find any vendor that has the unique, exact capabilities to diagnose and repair our system.��� Part Required:� 2028674 � ASSY 100 PIN ESC TI(SI)� 713411 - O-RING 260 CHEMRAZ 513� 713424 - O-RING 259 CHEMRAZ 513� 713510 - O-RING 158 CHEMRAZ 513� Installation: not to exceed 4 days of labor, includes travel and lodge� Shipping:� Vendor will use the NIST shipping account.� Ship with weekday priority delivery� Based on the extensive market research performed, SPTS/KLA Corporation is the only commercially available source to procure and install a new electrostatic chuck (ESC) to repair high helium flow errors on the CNST NanoFab SPTS Omega c2L Rapier deep silicon etch system.� �The North American Industry Classification System (NAICS) code for this acquisition is 811210 Electronic and Precision Equipment Repair and Maintenance.� No solicitation package will be issued. This notice of intent is not a request for competitive quotations; however, all responsible sources interested may identify their interest and capability to respond to this requirement. The Government will consider responses received by established due date/time set forth in this notice. Inquiries will only be accepted via email to Elizabeth.timberlake@nist.gov . No telephone requests will be honored.� A determination by the Government not to compete the proposed acquisition based upon responses to this notice is solely within the discretion of the Government. Information received will normally be considered solely for determining whether to conduct a competitive procurement in the future.�
 

Web Link

SAM.gov Permalink
(https://sam.gov/opp/1de8c5af34964bfcbde80d2cda401f3f/view)
 

Place of Performance

Address: Gaithersburg, MD 20899, USA

Zip Code: 20899

Country: USA
 

Record

SN06535810-F 20221208/221206230054 (samdaily.us)
 

Source

SAM.gov Link to This Notice
(may not be valid after Archive Date)

---

| FSG Index  |  This Issue's Index  |  Today's SAM Daily Index Page |