SOLICITATION NOTICE
66 -- Wafer Spinner - SEE DESCRIPTION (G5-213047.1)
- Notice Date
- 8/8/2025 10:29:00 AM
- Notice Type
- Solicitation
- NAICS
- 333242
— Semiconductor Machinery Manufacturing
- Contracting Office
- ARGONNE NATL LAB - DOE CONTRACTOR Lemont IL 60439 USA
- ZIP Code
- 60439
- Solicitation Number
- 5-B193-Q-00686-00
- Response Due
- 8/13/2025 10:00:00 AM
- Archive Date
- 08/14/2025
- Point of Contact
- Annette Wegrzyn, Phone: 6302522794
- E-Mail Address
-
awegrzyn@anl.gov
(awegrzyn@anl.gov)
- Description
- Argonne National Laboratory is seeking to source: 1qty Wafer spinner that can spin photoresist and other polymers - splash ring - speed 50-99rpm, 100-8000rom (+/- 1 rpm) with 150mm round - Bowl Cover made of safety glass - Process bowl of polypropylene (removable) - d- igital vacuum gauge - vacuum monitoring - cover open interlock - 115VAC 60/50hz 5/3 single phase - Acceleration 4000 rpm/sec - spinning time 1s-999s - 200 recipes with 40 steps each - waste bottle (0.5l in front of spinner) - Exhaust connection PG11 tube - Dimension: (wxdxh) cannot exceed (350x446x430mm) - directly-coupled hollow shaft motor with a transparent liquid separator on the vacuum line - spin chucks for : 150mm, 100mm, 3"", 2"" - with centering rings - piece chuck with 3mm diameter vacuum area - spare bowl - spare waste bottle - options for future dispense and edge bead upgrades Please see attached solicitation package - on the ANL-70 form: Please remember to complete points A-F on page 3. NO SOLICITATION WILL BE CONSIDERED WITHOUT ALL THESE COMPLETED. If any components are missing, your solicitation will be discarded. All forms and signed solicitation have a requested completion date of 8/13/25 at 12PM CST. If there are any questions please feel free to reach out to awegrzyn@anl.gov.
- Web Link
-
SAM.gov Permalink
(https://sam.gov/opp/57e4419511004ab4bfacd45edc283f78/view)
- Place of Performance
- Address: Lemont, IL 60439, USA
- Zip Code: 60439
- Country: USA
- Zip Code: 60439
- Record
- SN07543925-F 20250810/250808230048 (samdaily.us)
- Source
-
SAM.gov Link to This Notice
(may not be valid after Archive Date)
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