Advanced Research Projects Agency (ARPA), Contracts Management Office (CMO), 3701 North Fairfax Drive, Arlington, VA 22203-1714

A -- ADVANCED LITHOGRAPHY RESEARCH INTITIATIVE AND NETWORK SOL RA 96-13 DUE 051796 POC L. Glasser, ARPA/ETO, FAX (703) 696-2206. The Advanced Research Projects Agency (ARPA) is soliciting proposals to establish university-based networks to focus on long-term lithography research issues. The goal of this program is to revolutionize semiconductor manufacturing through research of innovative lithography technologies for future device generations and be a source of highly capable technology expertise in lithography. Proposals from teams of academic institutions to establish an advanced lithography focused research network are solicited. PROGRAM OBJECTIVE AND DESCRIPTION: The objective of this program is to solve the basic challenges in developing lithography equipment/processes that enables and accelerates the availability of advanced process technologies for pattern transfer of features with critical dimension of 100 nm and below. ARPA seeks innovative proposals for the establishment of a network for advanced lithography research, located at an academic institution or distributed amongst a team of academic institutions to perform leading-edge research and strengthen coupling to the semiconductor equipment industries. Additional information is provided in the Areas of Interest section of the RA 96-13 Proposer Information Pamphlet described below. PROGRAM SCOPE: The effort is projected to be a three to five year effort with available Government funding estimated at approximately $5,000,000. One or more awards are anticipated during the second-half of FY96. As a minimum, one-for-one cost sharing is expected. The POC for this effort is Dr. Lance Glasser, fax: (703) 696-2206, electronic mail: ''lglasser@arpa.mil.'' GENERAL INFORMATION: Proposers must obtain a pamphlet, RA 96-13 Proposer Information Pamphlet, which provides further information on areas of interest, the submission, evaluation, and funding processes, and proposal and proposal abstract formats. This pamphlet may be obtained by fax, electronic mail, or mail request from the administrative contact address given below. Proposals not meeting the format described in the pamphlet may not be reviewed. In order to minimize unnecessary effort in proposal preparation and review, proposers are strongly encouraged to submit brief proposal abstracts in advance of full proposals. An original and eight (8) copies of the proposal abstract must be submitted to ARPA/ETO, 3701 North Fairfax Drive, Arlington, VA 22203-1714 (ATTN: RA 96-13), on or before 4:00 PM, March 21, 1996. Proposal abstracts received after this date may not be reviewed. Upon review, ARPA will provide written feedback on the likelihood of a full proposal being selected and the date and time for submission of a full proposal. Proposers not submitting proposal abstracts must submit an original and eight (8) copies of the full proposal to ARPA/ETO, 3701 North Fairfax Drive, Arlington, VA 22203-1714 (ATTN: RA 96-13), on or before 4:00 PM, May 17, 1996 in order to be considered. This notice, in conjunction with the pamphlet, RA 96-13 Proposer Information, constitutes the total RA. No additional information is available, nor will a formal RFP or other solicitation regarding this announcement be issued. Requests for same will be disregarded. The Government reserves the right to select for award all, some, or none of the proposals received. All responsible sources capable of satisfying the Government's needs may submit a proposal which shall be considered by ARPA. Historically Black Colleges and Universities (HBCU) and Minority Institutions (MI) are encouraged to submit proposals and join others in submitting proposals. In any case in which the evaluation of two or more proposals is substantially equal, preference for award will be given to those proposals which include HBCUs and MIs as participants over those which do not include an HBCU or MI. Any objections to the terms of this RA or the RA 96-13 Proposer Information Pamphlet must be presented in writing within fifteen (15) calendar days of the publication of this RA in the CBD. Any objections to the conduct of receipt, evaluation or award of grants, cooperative agreements or other transactions must be presented in writing within ten (10) calendar days of the date the objector knows or should have known the basis for its objection. Objections must be provided in letter format, clearly stating that it is an objection or protest to this RA or to the conduct of evaluation or award of a grant, cooperative agreement, or other transaction, and providing a clearly detailed factual statement of the basis for objection. Objections must be received at the address stated above for delivery of proposals within the times indicated in order to be considered. All administrative correspondence and questions on this solicitation, including requests for information on how to submit a proposal abstract or proposal to this RA, should be directed to one of the administrative addresses below, e-mail or fax is preferred. ARPA intends to use electronic mail and fax for correspondence regarding RA 96-13. Proposals and proposal abstracts may not be submitted by fax or e-mail, any so sent will be disregarded. EVALUATION CRITERIA: Evaluation of proposal abstracts and proposals will be accomplished through a technical review of each proposal using the following criteria, which are listed in descending order of relative importance: (l) overall scientific and technical merit, (2) potential contribution and relevance to the ARPA mission, (3) financial commitment of the offeror (and/or it's members) to provide, as a minimum, one-for-one cost sharing, (4)plans and capability to accomplish technology transition, and (5) offeror's capabilities and related experience including the ability to manage a multiparticipant program. The administrative addresses for this RA are: Fax: 703-351-8616 (Addressed to: ARPA/ETO, RA 96-13), Electronic Mail: RA96-13@arpa.mil, Mail: ARPA/ETO, Attn.: RA 96-13, 3701 North Fairfax Drive, Arlington, VA 22203-1714 (0046)

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