Department of Commerce, Mountain Administrative Support Center, Procurement Division, MC3, 325 Broadway, Boulder, CO 80303-3328

66 -- ELECTRON BEAM EVAPORATION DEPOSITION SYSTEM SOL 52RANB60C032 POC Procurement Technicians, (303) 497-3221 This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. Solicitation No. 52RANB60C032 is being issued as a Request for Proposals (RFP). The solicitation document and incorporated provisions and clauses are those in effect through Federal Acquisition Circular 90-37. This is a 100% small business set-aside. The SIC code is 3825 and the small business size standard is 500 employees. One electron beam evaporation deposition system, Line Item 1, is required by this solicitation/contract. The equipment required by this solicitation/contract shall have and/or meet the following minimum requirements: 1. Vacuum System shall consist of a) cryopump 1500 1/s minimum; b) roughing pump 0.42m3/min (15 CFM) minimum; c) Performance shall be minimum of - base pressure 5 X 10 -7 torr in one hour. Preferred - base pressure 5 X 10 -8 torr in one hour. 2. Chamber shall be a) a 457.2 mm (18 inches) ID water cooled stainless steel chamber. Height should provide at least 45 cm (18 inches) between source and sample holder (sample holder provided by the Government). Minimum - 101.6 mm (4 inch) viewing port. Preferred - high vacuum port on side of chamber (call above phone number to obtain drawing for this). Preferred - English dimensions (for compatibility with existing equipment). b) Stainless steel base plate shall be minimum - 12 holes 25.4 mm (1 inch) diameter feedthroughs. Preferred - center large diameter conflat to accommodate e-beam source plus 10 holes 25.4 mm diameter (1 inch) for feedthroughs. (for side pumping configuration). c) Stainless steel top access plate shall be a minimum - 8 holes 25.4 mm (1 inch) diameter for feedthroughs and a 203.2 mm (8 inches) conflat port or a 203.2 mm (8 inch) conflat port with at least 4 conflat feedthroughs 101.6 mm (4 inches) diameter. 3. Vacuum gauging shall consist of a) two thermocouple gauges and b) one ion gauge. 4. Electronic control shall consist of a) vacuum gauge controller; b) a thickness monitor compatible with e-beam system for feed back controlled depositions. 5. electron beam deposition components shall be a) minimum - 6 pocket electron beam evaporation source; b) minimum - 4 cc interchangeable crucibles; c) minimum - 4 kW power supply with X-Y scanning controls; d) Preferred - 6 kW power supply. e) Preferred - Shutter assembly; f) Preferred - Conflat mounted e-beam gun with integral service feedthroughs (call above phone number to obtain drawing for this); g) Electronic e-beam source indexing controller. 6. Chassis shall consist a) framework to enclose vacuum components and electronics. b) Vacuum chamber hoist. c) Rack mount electronics. Delivery shall be 60 calendar days after Contractor's receipt of a notice of award. Delivery shall be F.O.B. Destination to NIST; Building 22; 325 Broadway; Boulder, CO 80303-3328. The provision at FAR 52.212-1, Instructions to Offerors - Commercial Items, applies to this acquisition. The provision at FAR 52.212-2, Evaluation - Commercial Items, applies to this acquisition. The evaluation criteria shall be technical capability, past performance, and Price. Technical and past performance, when combined, are of equal importance. Offerors shall include with their offers a completed copy of the provision at FAR 52.213-3, Offeror Representations and Certifications - Commercial Items. The clause at FAR 52.212-4, Contract Terms and Conditions - Commercial Items, applies to this acquisition. The clause at FAR 52.212-5, Contract Terms and Conditions Required to Implement Statutes or Executive Orders - Commercial Items, applies to this acquisition. Offers are due at 3:00 p.m. May 9, 1996 and shall be mailed to BID DEPOSITORY, DOC, MASC, MC3; Procurement Division, Room 5532; 325 Broadway; Boulder, CO 80303-3328. For solicitation information, call Linda V. Batlin at (303) 497-6320. (0110)

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