National Institute of Standards & Technology, Acquisition & Assistance Div., Bldg. 301, Rm B117, Gaithersburg, MD 20899

B -- EUV OPTICS FEASIBILITY STUDIES SOL 53SBNB760131 DUE 060397 POC Contracting Officer, Joan M. Smith -- (301) 975-6458, Contract Specialist, Tamara Grinspon -- (301) 975-4390 WEB: NIST Contracts Homepage, http://www.nist.gov/admin/od/contract/contract.htm. E-MAIL: NIST Contracts Office, Contract@nist.gov. The National Institute of Standards and Technology (NIST) has a need for services to perform theoretical design, fabrication and characterization of multilayer soft x-ray mirrors for precision optical components and the prediction of the influence this coating might have on the performance of soft x-ray optical systems. Thin films with predetermined thickness profiles will be used to correct the figure errors of the best commercially available optics. The goal is to produce components that have diffraction limited resolution for soft x-rays and to achieve surface figures that are a factor of 10 better than what is presently commercially available. The characterization of the optical surfaces will be done in cooperation with another NIST group, using interferometers that are under development. This project will extend past investigation in high resolution soft x-ray optics to applications in soft x-ray microscopy and EUV lithography. The Government anticipates award of a firm fixed price contract, with a period of performance from the date of contract award through April 30, 1998. The FOB point for deliverables is Destination, Gaithersburg, MD. Request for a Quotation Package will be available to all responsible, interested, small business firms. Please fax requests for a Quotation Package to Fax Number: (301) 963-7732. See numbered Notes 1 and 26. (0122)

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