Commander, Naval Air Systems Command (Code 2.5.3), Building 441, UNIT 7, Naval Air Station, Patuxent River, MD 20670-1127

A -- POINT SOURCE X-RAY LITHOGRAPHY PROGRAM FOR SUB-0.15 MICRON DESIGN RULES POC Lisa Abell, AIR-2.5.3.3.5 Contract Specialist (301) 757-8943, Craig Curtis, AIR-2.5.3.3 Contracting Officer (301) 757-2602 CNT N00019-97-C-2001/P00003 AMT $12,296,436.00 LINE 0101 DTD 123097 TO Sanders, A Lockheed Martin Company, Microwave Electronics Division, 65 Spit Brook Road, P.O. Box 868, Nashua, NH 03061-0868 (0005)

Loren Data Corp. http://www.ld.com (SYN# 0195 19980107\A-0009.AWD)