Naval Research Laboratory, Code 3220, 4555 Overlook Ave. S.W., Washington, D.C. 20375-5326

66 -- CHEMICAL MECHANICAL PLANARIZER SOL N00173-99-R -- HA01 POC Hilda R. Abdon, contract Specialist, Code 3220.HA, (202)767-0682, Wayne A Carrington, Contracting Officer WEB: click here, http://heron.nrl.navy.mil/contracts/home.htm. This is a combined synopsis/solicitation for commercial items prepared in accordance with the format in Federal Acquisition Regulation Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; proposals are being requested and a written solicitation will not be issued. This solicitation, N00173-99-R-HA01, is a request for proposal (RFP). The incorporated provisions and clauses of this acquisition are those in effect for Federal Acquisition Regulation (FAR) and Federal Acquisition Circular 97-08 and DAC 91-13; and for Defense Federal Acquisition Regulation Supplement (DFARS) through Defense Federal Acquisition Regulation 91-11 and all DDP Departmental Letters through 98-021. The small business size standard for this acquisition is 100 and the SIC code is 5049. This acquisition is unrestricted. The Naval Research Laboratory (NRL) has a requirement for a Chemical Mechanical Planarizer (CMP) to be a tool for doing research of chemical mechanical planarization processes and production of wafers. All capabilities are to be demonstrated during initial installation and training, and shall be reviewed prior to acceptance of the instrument. The tool shall be a stand-alone unit. It must be an enclosed system with integrated ventilation for fume exhaust and programmable semiautomatic operation through a touch screen interface. The system must be able to handle samples of variable size of up to 8 inches in diameter wafers. The three options shall include installation. The vendor will be required to certify that the offered equipment and software will perform precisely as described in this specification. All capabilities must be demonstrated during initial installation and training, and will be reviewed prior to acceptance of the instrument. The contractor must certify that the offered equipment and software meets or exceeds the following specifications: 1. Base System a. Automatic cycling with graphic user interface (including touch screen). b. Software modifications to allow logging machine parameter, provide alarm limits, and download process recipes. c. Programmable power pad conditioner with a nylon pad conditioning brush, a diamond plated pad conditioning disk #80 grit, a 4-inch pad conditioning disk holder, and a pad smoothing tool. d. A water-cooled hard-anodized aluminum table lapped flat 0.0005", stainless steel pan with drain. e. Variable speed table with AC inverter and digital speed indication. f. Variable speed powered quill with digital speed indication and load meter. g. On screen display for current- both table and quill. h. 3-inch and 4-inch wafer carrier assemblies. i. Carrier adapter for wafers smaller than 3-inch or irregular shaped samples. j. Carrier assembly table. k. Carrier spare parts kit -- 75 mm and 100 mm. l. Air polishing pressure system which can be regulated without need for counterbalance pressure m. Air polishing pressure calibration kit, includes pressure transducer, display unit, and special carrier for pressure transducer. n. Programmable down pressure system. o. Automatic rise of quill at end of cycle before polishing table stops. Plus panic table stop/quill rise when stop button is depressed. p. Load/unload station for pick-up and drop-off of wafer includes spray nozzles to wet bottom of wafer. q. Three (3) controlled flow non-recirculating slurry systems including pumps with programmable flow rate, and three(3) 15-gallon slurry reservoir with diaphragm pump. r. Distilled water system with flow meter control. s. Vacuum system with auto drain and separate 110v AC input. t. Work area enclosures with safety interlocked doors and access panels. u. Fume exhaust in stainless splash pan assembly. v. Bottom seal plate in main cabinet frame. w. Adjustable feet to allow tool leveling. x. Polypropylene table cover with handles. y. Manual override for all machine functions. z. Safety disconnect tool kit. aa. Maintenance tool kit. Option 1. a. Infrared temperature sensor. Option 2. a. Polishing table temperature control unit. Option 3. a. 6-inch wafer carrier assembly and carrier spare parts kit. Software License. All software is to be site licensed for use at Naval Research Laboratory. Warranty. The contractor must offer the government at least the same warranty terms as offered in its standard commercial contracts against defects in materials and workmanship for a period of one year from the date of the completion of installation. Installation, Training, and Support. There must be complete installation and operation of the system to these specifications. There must be no less than two days of training on start-up and technical assistance (on-site training) immediately succeeding completion of the installation of the equipment mentioned herein. Delivery and acceptance is the Naval Research Laboratory, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, FOB Destination, no later than 4 months from date of award. The FAR and DFAR provisions and clauses sited herein are incorporated by reference into this solicitation.Offerors are advised to propose in accordance with the provision at FAR 52.212-1, Instructions to Offerors-Commercial Items. The proposal must demonstrate an understanding of all requirements covered in the RFP's terms and conditions. General statements that the offer can or will comply with the requirements, that standard procedures will be used, that well known techniques will be used, or paraphrases the RFP's Specifications in whole or in part will not constitute compliance with these requirements concerning the content of the technical proposal. Offerors will be evaluated in accordance with FAR 52.212-2, Evaluation-Commercial Items. The specific evaluation criteria under paragraph (a) of FAR 52.212-2 is: (1) price (2) technical capability of the item offered to meet NRL's need (3) past performance. Technical and past performance combined, are of equal importance compared to price. Offerors are advised to include with their offer a completed copy of the following provisions: FAR 52.212-3, Offeror Representations and Certifications-Commercial Items and DFARS 252.225-7001, Buy American Act and Balance of Payment Program (41 U.S.C. 10 a-10d, E.O. 10582). The following FAR clauses apply to this acquisition: FAR 52.212-4, Contract Terms and Conditions-Commercial items, FAR 52.212-5, Contract Term and Conditions Required to Implement Statutes of Executive Orders-Commercial Items. The additional clauses that are applicable to this acquisition are FAR 52.203-6, FAR 52.219-4, FAR 52.219-8, FAR 52.222-26, FAR 52.222-35, FAR 52.222-36, FAR 52.222-37, and FAR 52.225-3. The clauses at DFARS 252.212-7001, Contract Terms and Conditions Required to Implement Statutes Applicable to Defense Acquisitions of Commercial Items, applies to this acquisition. The additional clauses cited applicable to this acquisition are DFARS 252.204-7004, DFARS 252.225-7001, DFARS 252.225-7007, DFARS 252.225-7012, and DFARS 252.225-7036, and DFARS 252.232-7009. Any contract awarded as a result of this solicitation will be a DO rated order certified for national use under the Defense Priorities and Allocations System (DPAS) (15CFR 700). Any questions generated, as a result of this solicitation must be received no later than 15 days before the closing date. Original and two (2) copies of the Offerors proposal must be delivered to Contract Officer, Code 3220, Bldg. 222, Rm. 115A, Naval Research Laboratory, Code 3220.HA, 4555 Overlook Ave. S.W. Washington, DC 20375-5326, and received no later than 4:00 p.m. E.S.T. on 08 MAR 1999. The package should be marked RFP N00173-99-R-HA01 Closing Date: 08 MAR 1999. For more information regarding this solicitation contact Hilda R. Abdon, Contract Specialist at (202) 767-0682. All responsible sources may submit a proposal, which shall be considered by the agency. Synopsis number HA01. EMAILADD: Contracts.nrl.navy.mil EMAILDESC: <A HREF="mailto:to the POC</A>">Click here to forward a</A> request via e-mail Posted 02/08/99 (W-SN295967). (0039)

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