US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSRL-CS-PR, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

66 -- THIN FILM STRESS MEASUREMENT SYSTEM SOL DAAD17-99-Q-0472 DUE 032599 POC POC Barbara DeSchepper, Buyer, 410-278-5425, Jean Craig, Contracting Officer, 410-278-6517 DESC: The U.S. Army Research Laboratory, Aberdeen Proving Ground, MD intends to award on a sole-source basis with KLA-TENCOR, Portsmouth, NH 03801 for the purchase of FLX 2320 Thin Film Stress Measurement System, with 3-D Mapping Option; 100mm Diameter, 20mm radius mirror plus optical flat and locator ring; 150mm Certified Wafer Pair. Minimum scan step of 0.02mm; 1250 points per scan; a dual wave length laser compliant with Class 1 Laser 21 CFR, Chapter 1, Sub Chapter J; computer controlled forced gas cooling with capability of cooling from 500 deg C to 100 deg C in 30 minutes; repeatability of 10 Mdynes per square centimeter and accuracy of less than 2.5 percent or 1MPa. Features include: Dual wavelength scanning laser, scan length up to 200mm with 1250 point per scan and a minimum scan step of 0.02mm; wafer size capabilities of 75, 100, 125, 150, and 200mm; inert atmosphere; computer controlled forced gas cooling; PC with the following minimum configuration: 133 MHz Pentium processor, 16 MB RAM, 2.0 G hard drive, SVGA monitor; User manuals, Cleanroom paper; 208-240 V, 50/60 Hz operating power requirements; Stage with -65 deg C to room temperature to 55 deg C capabilities; 3-D mapping option; 100mm diameter, 20mm Radius Mirror plus optical flat and locator ring; 150mm Certified wafer pair; Standard KLA-Tencor 12 month warranty includes parts and labor. Coverage of 8 hours per day, 5 days a week. Warranty begins upon successful execution of the KLA-TENCOR standard field acceptance test, not to exceed 60 days from shipment. Utilization of the system in production will immediately start warranty. The Army Research Laboratory has found no other source and this instrument is not known to exist anywhere else. Inquiries will only be accepted by FAX at (410)278-6522, Attn Barbara DeSchepper. "See Note 22" ***** CITE: (W-177 SN216393) Posted 03/10/99 (W-SN306842). (0069)

Loren Data Corp. http://www.ld.com (SYN# 0299 19990312\66-0009.SOL)