US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSRL-CS-PR, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

36 -- TWO CLUSTER TOOLS INCLUDING FOUR PROCESS CHAMBERS (MODULES) AND ACCESSORIES SOL W71B7J-9109-M181 DUE 071699 POC Beth Smith, Contract Specialist/Contracting Officer, 301/394-3371 This requirement is for the purchase of two (2) cluster tools, including four process chambers (modules) and accessories as follows: 1) Cluster Tool for depositing films on semiconductor wafers with two process chambers for different kinds of deposition processes: a Plasma Enhanced Chemical Vapor Desposition (PECVD) module and an Inductively Coupled Plasma (ICP) module for high density PECVD (P/N VLR702-PM311R); 2) ICP PECVD Module (P/N PM770I-8R-HDP-HT); 3) Cluster Tool for etching semiconductor wafers with two process chambers for different etch processes: a chamber for deep Si etching using the patented Bosch process, and a chamber for CI2 etching (P/N VLR702-PM770I-10R-B); 4) Chlorine Etch Module (P/N PM770I-10R); 5) Mass Flow Control Gas Channel (P/N MFC-CH-M-BP-GLF); 6) Laser CCD Motorized End Point System. This requirement also includes an option for two (2) Ball Room Installation (P/N BALLl-RM-PKG). It is intended to award this requirement on a sole source basis to Plasma Therm, St. Petersburg,FL. A market survey was performed which included survey of manufacturers supplying this type of equipment and according to the Solid State Technology Buying Guide there are no other companies that make deposition equipment. The survey determined that Plasma-Therm is the only manufacturer offering a cluster tool system with Bosch etching process and deposition capabilities incorporated in to the same tool and meets all our requirements in interchangeable modules which is deemed critical to Army Research Laboratory (ARL) research requirements. Responsible sources may submit a capability statement by facsimile to Beth Smith, (301) 394-1162, which shall be considered by the agency. No telephone requests will be honored. See Numbered Notes: 22 Posted 07/02/99 (W-SN349854). (0183)

Loren Data Corp. http://www.ld.com (SYN# 0218 19990707\36-0002.SOL)