70 -- PATTERN GENERATOR SOFTWARE

Notice Date

January 8, 2001

Contracting Office

DOC; Mountain Administrative Support Center; Acquisition Management Division; 325 Broadway MC3; Boulder, CO 80303-3328

ZIP Code

80303-3328

Solicitation Number

NB814000104032JW

Response Due

January 26, 2001

Point of Contact

Jacqueline Wright (303) 497-5282, FAX (303) 497-3163

E-Mail Address

NOAA; MASC Acquisitions Management (Jacqueline.S.Wright@noaa.gov)

Description

The National Institute of Standards and Technology (NIST) has a requirement for software to convert designs into masks that will be generated by an Optical Pattern Generator. This software will fracture mask layouts generated using standard Computer Aided Design (CAD) software into a format that may be read by standard pattern generators. The pattern generator will then read this data (Mann format) in which each flash is individually described. The software must be compatible with our existing CAD programs, thus it must be able to read CIF and GDSII input files and output files either for an existing Mann 3600 pattern generator or future Electromask pattern generator. The software must run on existing computer hardware/operating system platforms; the options are Compaq Alpha/OSF1 or Intel Pentium/Linux. = An update path to Pentium/Linux is highly desirable if not initially available. This should be a commercially available software package with a large (greater than 10 installation) user base. The software package must have the following fracturing capabilities: Ability to invert the tone of the input image in order to tone = reverse certain mask layers Ability to output complex patterns containing at least 50,000 flashes Scale the input by some linear factor. Sizing of objects to grow or shrink them to compensate for process bias Boolean functions =96 combining two mask layers to overlay in a = logical OR, AND, XOR functions Rotation =96 the software must be able to rotate a pattern by = multiples of 90 degrees or mirror about the major axes Pattern fracturing errors must be reported in a concise but complete manner The program must be scriptable such that only command line options need be given for a simple fracture The program must have a graphical user interface capable of: Zooming in or out on the pattern Selecting either the input or the output pattern Measuring on-mask dimension using mouse clicks Have different fill pattern/color capability for each layer The program must be able to optimize the number of flashes for a given input pattern and sort the output flashes for minimum exposure time on the pattern generator. The software should have the option of back-conversion to GDSII in = order to perform CAD-based comparisons with other designs and must have phone-in support to answer any questions with a file transfer mechanism. Interested sources must submit a written qualification statement with literature, by January 26, 2001, and must contain sufficient information to clearly establish the ability to provide the required software package. Responses must reference Synopsis No. NB814000104032JW. This announcement/solicitation is being issued under the Simplified Acquisition Procedures, FAR Part 13 (NTE $100,000.00). There is no bid package available, just the important salient characteristics listed above. The award decision will be based upon the best value to the Government, with technical merit, past performance = and availability being significantly more important than price. A = technical panel will evaluate the responses. Terms and Conditions and agency level protest procedures are referenced at http://netsite.esa.doc.gov.oam. Technical questions can be directed to Paul Dresselhaus at (303) 497-5211. JACQUELINE WRIGHT Purchasing Agent

Record

Loren Data Corp. 20010110/70SOL005.HTM (D-008 SN50A3N1)