66 -- MASK ALIGNER

Notice Date

February 22, 2001

Contracting Office

NASA/Glenn Research Center, 21000 Brookpark Road, Cleveland, OH 44135

ZIP Code

44135

Solicitation Number

RFQ3-168558

Response Due

March 7, 2001

Point of Contact

Mary Lou Guthrie, Contracting Officer, Phone (216) 433-2789, Fax (216) 433-2480, Email MaryLou.Guthrie@grc.nasa.gov -- Kurt A. Straub, Contracting Officer, Phone (216) 433-2769, Fax (216) 433-2480, Email Kurt.A.Straub@grc.nasa.gov

E-Mail Address

Mary Lou Guthrie (MaryLou.Guthrie@grc.nasa.gov)

Description

This notice is a combined synopsis/solicitation for commercial items prepared in accordance with the format in FAR Subpart 12.6, as supplemented with additional information included in this notice. This announcement constitutes the only solicitation; quotes are being requested and a written solicitation will not be issued. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). Specifications for Mask Aligner 1. Adjustable vacuum contact between mask and wafer/piece. 2. Capability for proximity alignment. 3. Capability for manual loading. 4. Must have easily interchangeable vacuum chucks for holding 2-inch wafers or pieces as small as 20 millimeters square. 5. Must be upgradeable to handle 4-inch wafers. 6. Capable of holding 4-inch x 4-inch masks, up to 6-inch x 6-inch masks. 7. Viewing system must be splitfield, with fiber optic illumination. 8. Must have high-resolution video alignment system equipped with a CCD TV camera, with appropriate electronic controls and TV monitor. 9. Viewing optics must be capable of at least 150X magnification. 10. Must be equipped with mercury lamp (min. 250 Watts) which delivers near-UV (365/405 nm) radiation that is uniform (<5% deviation) over area at least 4 inches by 4 inches, with a power density of 12 mW/cm2 or greater. Total exposure control accomplished by light integration. 11. Aligner must be mounted on a vibration isolation frame or table. 12. Required: an UV radiometer with a 405-nm light meter probe. 13. On-site installation and operations training. The provisions and clauses in the RFQ are those in effect through FAC 97-21. The NAICS Code and the small business size standard for this procurement are 334516 and 500, respectively. The quoter shall state in their quotation their size status for this procurement. All qualified responsible business sources may submit a quotation which shall be considered by the agency. Delivery to Glenn Research Center is required within 120 days ARO. Delivery shall be FOB Destination. The DPAS rating for this procurement is DO-C9. Quotations for the items(s) described above are due by 4:30pm, March 7, 2001 and may be mailed or faxed to NASA Glenn Research Center, Attention: Mary Lou Guthrie, 21000 Brookpark Rd., MS 500-306, Cleveland, OH 44135, or faxed to Mary Lou Gurthrie, FAX #(216) 433-2480 and include, solicitation number, FOB destination to this Center, proposed delivery schedule, discount/payment terms, warranty duration (if applicable), taxpayer identification number (TIN), identification of any special commercial terms, and be signed by an authorized company representative. Quoters are encouraged to use the Standard Form 1449, Solicitation/Contract/Order for Commercial Items form found at URL: http://procure.arc.nasa.gov/Acq/Forms/Index.html to submit a quotation. Quoters shall provide the information required by FAR 52.212-1. Addenda to FAR 52.212-1 are as follows: None. If the end product(s) quoted is other than domestic end product(s) as defined in the clause entitled "Buy American Act -- Supplies," the quoter shall so state and shall list the country of origin. The Representations and Certifications required by FAR 52.2l2-3 may be obtained via the internet at URL: http://ec.msfc.nasa.gov/msfc/pub/reps_certs/sats/ FAR 52.212-4 is applicable. Addenda to FAR 52.212-4 are as follows: None. FAR 52.212-5 is applicable and the following identified clauses are incorporated by reference. TBD prior to award. The FAR may be obtained via the Internet at URL: http://www.arnet.gov/far/ The NFS may be obtained via the Internet at URL: http://www.hq.nasa.gov/office/procurement/regs/nfstoc.htm Questions regarding this acquisition must be submitted in writing no later than February 27, 2001. Selection and award will be made to the lowest priced, technically acceptable quoter. Technical acceptability will be determined by information submitted by the quoter providing a description in sufficient detail to show that the product quoted meets the Government's requirement. Quoters must provide copies of the provision at 52.212-3, Offeror Representation and Certifications -- Commercial Items with their quote. See above for where to obtain copies of the form via the Internet. An ombudsman has been appointed -- See NASA Specific Note "B". It is the quoter's responsibility to monitor the following Internet site for the release of amendments (if any): http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=C&pin=22 Potential quoters will be responsible for downloading their own copy of this combination synopsis/solicitation and amendments (if any). Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html

Web Link

Click here for the latest information about this notice (http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=22#RFQ3-168558)

Record

Loren Data Corp. 20010226/66SOL013.HTM (D-053 SN50E3N5)