66 -- PLASMA DOWN STREAM STRIPPER

Notice Date

May 15, 2001

Contracting Office

US Army Materiel Command Acquisition Center, Army Research Laboratory Contracting Division, Attn: AMSSB-ACA-P, 2800 Powder Mill Road, Adelphi, Maryland 20783-1197

ZIP Code

20783-1197

Solicitation Number

W71B7J-1113-M182

Response Due

May 31, 2001

Point of Contact

Robert M Tomko, (301) 394-3691

Description

The Army Research Laboratory is soliciting on a brand name or equal basis a commercially available plasma down stream stripper. The brand name equipment is model 200ES manufactured by Axcelis Technologies, Inc, Photoresist Processing Products, 7600 Standish Place, Rockville, MD. The salient characteristics of this equipment are: (1) wafer chuck with stripping/descumming temperature range , RT to 350 C with closed loop temperature control; (2) particulate contamination of .03 particles per square cm of .2 mm in size after a 60 second ash process; (3) metal contamination of <1010 atoms/square cm; (4) flat band voltage shift on electrical devices of .1 V greater than control (measured after DI rinse); (5) selectivity during the stripping process of photoresist-: to silicon of >1000:1; to oxide >1000:1; to poly >1000:1; and to metal >1000:1; (6) capable of photoresist ash rates, O2, N2, H2, 6mm per minute on a 150 mm wafer (Process: O2 1.7-2.7 slpm, forming gas (3% H2 in N2) .3 -- .5 slpm, CF4 5-10 sccm, 270 C, 2000 watts, 1.2 Torr), (Conditions: unpatterned 1.2mm thick Novolac-type positive-tone photoresist hard baked to 110 C for 60 seconds. Ashed to endpoint with 10% over ash. Ash teperature 270 C, 2000 W, 1.2 Torr, 5 sccm CF4. ); (7) Capable of using CF4 in stripping process without degradation of the plasma tube; (8) ash rate and etch rate uniformity, within wafer (max-min/2*avg.) 5%, 1 s(7.5%); wafer-to-wafer 5%, 1 s (200 mm wafers); (9) wafer descum capability 65 wph (200 mm wafers); and (10) microwave generated plasma, upstream and isolated from stripping chamber. Equipment may be new or refurbished except that refurbished equipment must have the following new parts: contact temperature measurement probe, vacuum throttle valve, vacuum fore line valve, vacuum baratron gage, halogen heating lamps, primary quartz heater window. Both new and refurbished equipment must have one year warranty on all parts and labor. All responsible sources may submit a capability statement to Robert Tomko by facsimile (301-394-1891) or email rtomko@arl.army.mil.

Record

Loren Data Corp. 20010517/66SOL004.HTM (W-135 SN50M1P3)