D -- INFORMATION TECHNOLOGY SERVICES

Notice Date

July 16, 2001

Contracting Office

Department of Commerce, National Institute of Standards and Technology (NIST), Acquisition and Logistics Division, 100 Bureau Drive, Building 301, Room B129, Mail Stop 3571, Gaithersburg, MD, 20899-3571

ZIP Code

20899-3571

Solicitation Number

Reference-Number-01-844-3166

Response Due

July 30, 2001

Point of Contact

Fred Ettehadieh, Contract Specialist, Phone (301) 975-8329, Fax (301) 975-8884, Email fred.ettehadieh@nist.gov -- Joseph Widdup, Contract Specialist, Phone (301) 975-6324, Fax (301) 975-8884, Email joseph.widdup@nist.gov

Description

Department of Commerce, National Institute of Standards and Technology (NIST) intends to award, on a sole source basis, under the authority of 13.106-1(b), Soliciting from a single source, to University of Florida, 516 Weil Hall, Gainesville, Florida 32611 for development of Radiative Heat Transfer Tools for Semiconductor Processing. The project aims at developing radiative heat transfer tools to determine the effective emissivity of silicon wafers in the processing chamber that uses a reflective shield. The goal of the NIST rapid thermal processing (RTP) project, temperature sensing for semiconductor materials processing, is to develop technologies required to measure RTP wafer temperature as prescribed by the International Technical Roadmap for Semiconductors 2000 traceable to the International Temperature Scale 1990 with an uncertainty of plus / minus 2 degrees Celsius at 1000 degrees Celsius. The contractor must develop a software program to model Si wafer emissivities. The software program must use a Monte Carlo radiation modeling algorithm and must include the effects of multilayer smooth parrallel dieltectric thin films on the wafer and incorporate the bidirectional distribution function of the wafer into the code. Dr. Zhuomin Zhang at the University of Florida is the only known source with the unique expertise in Monte Carlo modeling algorithms software development, radiative heat transfer theory, RTP, and the NIST RTP test bed and research project. Dr. Zhuomin Zhang has had extensive collaboration with NIST over the years in the area of the NIST RTP and test bed projects. The recent receipt of the Presidential Early Career Award for Scientists and Engineers (PECASE) illustrates recognition of his expertise. This notice of intent is not a request for competitive quotes; however, the Government will consider all quotes or other information received by 7/30/2001. Information received will normally be considered solely to determine whether to conduct a competitive procurement. A Request for Quotation (RFQ) is not available. The NAICS code for acquisition is 541690 and the size standard is $5.0 million. A determination by the Government not to compete this requirement based upon responses to this notice is solely within the discretion of the Contracting Officer. The Government anticipates awarding a firm-fixed-price purchase order as a result of this requirement.

Web Link

Visit this URL for the latest information about this (http://www.eps.gov/spg/DOC/NIST/AcAsD/Reference-Number-01-844-3166/ listing.html)

Record

Loren Data Corp. 20010718/DSOL006.HTM (D-197 SN50R9H5)