66 -- REACTIVE ION ETCHER

Notice Date

August 22, 2001

Contracting Office

NASA/Goddard Space Flight Center, Code 215, Greenbelt, MD 20771

ZIP Code

20771

Solicitation Number

553-30946-929

Response Due

September 12, 2001

Point of Contact

Maria D. Hutcheson, Contract Specialist for Simplified Acquisitions, Phone (301) 286-3723, Fax (301) 286-1720, Email maria.d.hutcheson.1@gsfc.nasa.gov

E-Mail Address

Maria D. Hutcheson (maria.d.hutcheson.1@gsfc.nasa.gov)

Description

NASA/GSFC plans to issue a Request for Quotation (RFQ) for a reactive ion etcher and related supplies. This procurement is being conducted under the Simplified Acquisition Procedures (SAP). NASA/GSFC requires a reactive ion etcher which meets the specifications necessary for compatibilty with existing laboratory equipment. March Instruments, Inc. of Concord, California provides a product which meets NASA/GSFC's specifications and is compatible with existing equipment. March Instrument's reactive ion etcher, model #CS-1701 etches silicon, silicon nitride and silicon oxide, it's table-top and handles at least a 6 inch silicon wafer. In addition, the system has uniformity of 3 percent or better and handles the following gases: SF6, SF4, CHF3, O2 and AR -- having 6 gas manifolds. The system is computer controlled and has an optical end point detector. Specific requirements are detailed in the file attached to this advertisement. The Government intends to acquire a commercial item using FAR Part 12. Interested organizations may submit their capabilities and qualifications to perform the effort in writing to the identified point of contact not later than 4:30 p.m. local time on September 4, 2001. Such capabilities/qualifications will be evaluated solely for the purpose of determining whether or not to conduct this procurement on a competitive basis. A determination by the Government not to compete this proposed effort on a full and open competition basis, based upon responses to this notice is solely within the discretion of the government. Written communications are acceptable in response to this notice. All responsible sources may submit an offer which shall be considered by the agency. An Ombudsman has been appointed. See NASA Specific Note "B". Any referenced notes can be viewed at the following URL: http://genesis.gsfc.nasa.gov/nasanote.html

Web Link

Click here for the latest information about this notice (http://nais.msfc.nasa.gov/cgi-bin/EPS/bizops.cgi?gr=D&pin=51#553-30946-929)

Record

Loren Data Corp. 20010824/66SOL018.HTM (D-234 SN50V6Z3)